Characterization of cross-section correction to charge exchange recombination spectroscopy rotation measurements using co- and counter-neutral-beam views

2008 ◽  
Vol 79 (10) ◽  
pp. 10F531 ◽  
Author(s):  
W. M. Solomon ◽  
K. H. Burrell ◽  
R. Feder ◽  
A. Nagy ◽  
P. Gohil ◽  
...  
Author(s):  
Margaret L. Sattler ◽  
Michael A. O'Keefe

Multilayered materials have been fabricated with such high perfection that individual layers having two atoms deep are possible. Characterization of the interfaces between these multilayers is achieved by high resolution electron microscopy and Figure 1a shows the cross-section of one type of multilayer. The production of such an image with atomically smooth interfaces depends upon certain factors which are not always reliable. For example, diffusion at the interface may produce complex interlayers which are important to the properties of the multilayers but which are difficult to observe. Similarly, anomalous conditions of imaging or of fabrication may occur which produce images having similar traits as the diffusion case above, e.g., imaging on a tilted/bent multilayer sample (Figure 1b) or deposition upon an unaligned substrate (Figure 1c). It is the purpose of this study to simulate the image of the perfect multilayer interface and to compare with simulated images having these anomalies.


Author(s):  
Dirk Doyle ◽  
Lawrence Benedict ◽  
Fritz Christian Awitan

Abstract Novel techniques to expose substrate-level defects are presented in this paper. New techniques such as inter-layer dielectric (ILD) thinning, high keV imaging, and XeF2 poly etch overflow are introduced. We describe these techniques as applied to two different defects types at FEOL. In the first case, by using ILD thinning and high keV imaging, coupled with focused ion beam (FIB) cross section and scanning transmission electron microscopy (STEM,) we were able to judge where to sample for TEM from a top down perspective while simultaneously providing the top down images giving both perspectives on the same sample. In the second case we show retention of the poly Si short after removal of CoSi2 formation on poly. Removal of the CoSi2 exposes the poly Si such that we can utilize XeF2 to remove poly without damaging gate oxide to reveal pinhole defects in the gate oxide. Overall, using these techniques have led to 1) increased chances of successfully finding the defects, 2) better characterization of the defects by having a planar view perspective and 3) reduced time in localizing defects compared to performing cross section alone.


1995 ◽  
Vol 37 (2) ◽  
pp. 71-94 ◽  
Author(s):  
M von Hellermann ◽  
P Breger ◽  
J Frieling ◽  
R Konig ◽  
W Mandl ◽  
...  

Author(s):  
Nikolai Nikolaevich Bakharev ◽  
I M Balachenkov ◽  
F V Chernyshev ◽  
Vasily K Gusev ◽  
Evgeniy Kiselev ◽  
...  

Abstract Active NPA measurements of the fast ion distribution using the neutral beam as an additional charge exchange target are discussed. Expressions for the calculation of the NPA signal based on the fast ion distribution and for the reconstruction of the fast ion distribution from the NPA signal are provided. Demonstration of the described approach is carried out on the Globus-M2 spherical tokamak, where a scanning system for the NPAs was recently installed. Main features of the active NPA application on Globus-M2 are considered. The energy and spatial distributions of fast deuterium ions at dedicated pitch angles are obtained and compared with the calculated ones. Key traits of the obtained distributions are considered and explained.


1963 ◽  
Vol 41 (10) ◽  
pp. 1535-1541 ◽  
Author(s):  
J. Wm. McGowan ◽  
Larkin Kerwin

When applied to the mass spectrum of argon, the techniques of Aston banding and I.P. curve comparison reveal the presence of metastable states of Ar+ near the ionization threshold of Ar++. These metastable states make possible the collision charge-exchange reaction 10/20 with an over-all cross section at 1 kev of a least 2.5 Å2.


2010 ◽  
Vol 19 (08n10) ◽  
pp. 1609-1618
Author(s):  
J. AICHELIN ◽  
C. HARTNACK ◽  
Y. LEIFELS ◽  
H. OESCHLER ◽  
S. VOGEL

We review in this contribution the information we can obtain from heavy-ion experiments about the interaction of mesons with matter. We demonstrate that the vector mesons seen in experiments come predominantly from low densities. Kaons offer a better opportunity but most of the presently available experimental observables do not allow to analyze separately the three essential unknown quantities: the kaon production cross-section in the medium, the K+N potential interaction at finite densities and temperatures and the kaon (elastic or charge exchange) rescattering cross-section in the medium. We propose a measurement which almost exclusively tests the K+N potential.


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