Reduction of photoleakage current in polycrystalline silicon thin-film transistor using NH3 plasma treatment on buffer layer

2008 ◽  
Vol 92 (15) ◽  
pp. 153507 ◽  
Author(s):  
Hau-Yan Lu ◽  
Ting-Chang Chang ◽  
Po-Tsun Liu ◽  
Hung-Wei Li ◽  
Chin-Wei Hu ◽  
...  
Keyword(s):  
Thin Film ◽  
Plasma Treatment ◽  
Buffer Layer ◽  
Polycrystalline Silicon ◽  
Thin Film Transistor ◽  
Silicon Thin Film

A Center-Offset Polycrystalline-Silicon Thin-Film Transistor With ${\rm n}^{+}$ Amorphous-Silicon Contacts

2009 ◽  
Vol 30 (1) ◽  
pp. 36-38 ◽  
Author(s):  
J. H. Oh ◽  
D. H. Kang ◽  
W. H. Park ◽  
J. Jang ◽  
Y. J. Chang ◽  
...  
Keyword(s):  
Thin Film ◽  
Amorphous Silicon ◽  
Polycrystalline Silicon ◽  
Thin Film Transistor ◽  
Silicon Thin Film

A Novel SiGe Raised Source/Drain Polycrystalline Silicon Thin-Film Transistor with Improved On-Current and Larger Breakdown Voltage

2003 ◽  
Vol 42 (Part 1, No. 3) ◽  
pp. 1164-1167 ◽  
Author(s):  
Du-Zen Peng ◽  
Ting-Chang Chang ◽  
Chin-Fu Liu ◽  
Ping-Hung Yeh ◽  
Po-Tsun Liu ◽  
...  
Keyword(s):  
Thin Film ◽  
Breakdown Voltage ◽  
Polycrystalline Silicon ◽  
Thin Film Transistor ◽  
Silicon Thin Film

Polycrystalline silicon thin-film transistor with self-aligned SiGe raised source/drain

2002 ◽  
Vol 81 (25) ◽  
pp. 4763-4765 ◽  
Author(s):  
Du Zen Peng ◽  
Ting-Chang Chang ◽  
Po-Sheng Shih ◽  
Hsiao-Wen Zan ◽  
Tiao-Yuan Huang ◽  
...  
Keyword(s):  
Thin Film ◽  
Polycrystalline Silicon ◽  
Thin Film Transistor ◽  
Silicon Thin Film

3.5-Inch QCIF AMOLED Panels with Ultra-low-Temperature Polycrystalline Silicon Thin Film Transistor on Plastic Substrate

ETRI Journal ◽  
2008 ◽  
Vol 30 (2) ◽  
pp. 308-314 ◽  
Author(s):  
Yong-Hae Kim ◽  
Choong-Heui Chung ◽  
Jaehyun Moon ◽  
Su-Jae Lee ◽  
Gi Heon Kim ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Polycrystalline Silicon ◽  
Thin Film Transistor ◽  
Plastic Substrate ◽  
Silicon Thin Film
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