Density variation of nanoscale patterns in thermal nanoimprint lithography
2010 ◽
Vol 87
(5-8)
◽
pp. 859-863
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Keyword(s):
2010 ◽
Vol 28
(6)
◽
pp. C6M125-C6M129
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2012 ◽
Vol 516
◽
pp. 269-274
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2006 ◽
Vol 05
(04n05)
◽
pp. 559-563
◽
2016 ◽
Vol 19
(12)
◽
pp. 1083-1097
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Keyword(s):
2006 ◽
Vol 21
(3)
◽
pp. 290-294
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