Noninvasive method to measure the ion flux in capacitive discharge

2007 ◽  
Vol 91 (22) ◽  
pp. 221505 ◽  
Author(s):  
Min-Hyong Lee ◽  
Hyo-Chang Lee ◽  
Chin-Wook Chung
Keyword(s):  
Ion Flux ◽  
Noninvasive Method ◽  
Capacitive Discharge

scholarly journals Theoretical and experimental study of ion flux formation in an asymmetric radio-frequency capacitive discharge

2011 ◽  
Vol 20 (1) ◽  
pp. 015011 ◽  
Author(s):  
I V Schweigert ◽  
D A Ariskin ◽  
T V Chernoiziumskaya ◽  
A S Smirnov
Keyword(s):  
Experimental Study ◽  
Radio Frequency ◽  
Ion Flux ◽  
Capacitive Discharge

A Simple Ion Flux Estimation in a Low Pressure R.F. Plasma (13.56 MHz)

1997 ◽  
Vol 7 (4) ◽  
pp. 937-950
Author(s):  
I. Grenier ◽  
V. Massereau ◽  
A. Celerier ◽  
J. Machet
Keyword(s):  
Low Pressure ◽  
Ion Flux ◽  
Flux Estimation

Control of Magnetic Field for Sustainment of Ion Production and Uniform Ion Flux to Substrate in Neutral Loop Discharge Plasma

2012 ◽  
Vol 132 (4) ◽  
pp. 278-283 ◽  
Author(s):  
Takuhei Yoshida ◽  
Yohei Sakurai ◽  
Hirotake Sugawara ◽  
Akihiro Murayama
Keyword(s):  
Magnetic Field ◽  
Discharge Plasma ◽  
Ion Flux ◽  
Ion Production

Thermograms of high-frequency capacitive discharge between solid and liquid electrodes

2018 ◽  
Vol 56 (5) ◽  
pp. 891-894
Author(s):  
Az. Gaisin ◽  
◽  
F. Gaisin ◽  
Al. Gaisin ◽  
L. Bagautdinova ◽  
...  
Keyword(s):  
High Frequency ◽  
Capacitive Discharge ◽  
Liquid Electrodes
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