Characterization of Copper Line Array Erosion with Picosecond Ultrasonics

2007 ◽  
Author(s):  
Nicolas Pic ◽  
Karim Bennedine ◽  
Guray Tas ◽  
Dario Alliata ◽  
Jana Clerico ◽  
...  
Keyword(s):  
Copper Line ◽  
Line Array ◽  
Picosecond Ultrasonics

scholarly journals Picosecond ultrasonics for elasticity-based imaging and characterization of biological cells

2020 ◽  
Vol 128 (16) ◽  
pp. 160902 ◽  
Author(s):  
Fernando Pérez-Cota ◽  
Rafael Fuentes-Domínguez ◽  
Salvatore La Cavera ◽  
William Hardiman ◽  
Mengting Yao ◽  
...  
Keyword(s):  
Biological Cells ◽  
Picosecond Ultrasonics

Characterization of Ta and TaN diffusion barriers beneath Cu layers using picosecond ultrasonics

Ultrasonics ◽  
2006 ◽  
Vol 44 ◽  
pp. e1269-e1275 ◽  
Author(s):  
Juerg Bryner ◽  
Dieter M. Profunser ◽  
Jacqueline Vollmann ◽  
Elisabeth Mueller ◽  
Juerg Dual
Keyword(s):  
Diffusion Barriers ◽  
Picosecond Ultrasonics

CHARACTERIZATION OF TRANSPARENT AND OPAQUE THIN FILMS USING LASER PICOSECOND ULTRASONICS

1992 ◽  
Vol 7 (1-6) ◽  
pp. 149-163 ◽  
Author(s):  
O.B WRIGHT ◽  
T. HYOGUCHI ◽  
K. KAWASHIMA
Keyword(s):  
Thin Films ◽  
Picosecond Ultrasonics

Complete elastic characterization of lithium phosphorous oxynitride films using picosecond ultrasonics

2013 ◽  
Vol 548 ◽  
pp. 366-370 ◽  
Author(s):  
F. Xu ◽  
L. Belliard ◽  
D. Fournier ◽  
E. Charron ◽  
J.-Y. Duquesne ◽  
...  
Keyword(s):  
Picosecond Ultrasonics

Characterization of sub-50-nm line array structures with angle-resolved multiple wavelength scatterometry

2008 ◽  
Author(s):  
Michael Kotelyanskii ◽  
Fei Shen ◽  
Gary Jiang ◽  
Benjamin Bunday
Keyword(s):  
Multiple Wavelength ◽  
Line Array ◽  
Array Structures

scholarly journals Characterization of thin-film adhesion and phonon lifetimes in Al/Si membranes by picosecond ultrasonics

2017 ◽  
Vol 19 (5) ◽  
pp. 053019 ◽  
Author(s):  
Martin Grossmann ◽  
Martin Schubert ◽  
Chuan He ◽  
Delia Brick ◽  
Elke Scheer ◽  
...  
Keyword(s):  
Thin Film ◽  
Film Adhesion ◽  
Thin Film Adhesion ◽  
Picosecond Ultrasonics

Characterization of Sub-micron Metal Line Arrays Using Picosecond Ultrasonics

2020 ◽  
Author(s):  
M. Mehendale ◽  
M. Kotelyanskii ◽  
R. Mair ◽  
P. Mukundhan ◽  
J. Bogdanowicz ◽  
...  
Keyword(s):  
Metal Line ◽  
Picosecond Ultrasonics
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