Interference lithography by a soft x-ray laser beam: Nanopatterning on photoresists

2007 ◽  
Vol 102 (3) ◽  
pp. 034313 ◽  
Author(s):  
A. Ritucci ◽  
A. Reale ◽  
P. Zuppella ◽  
L. Reale ◽  
P. Tucceri ◽  
...  
Keyword(s):  
Laser Beam ◽  
Interference Lithography ◽  
X Ray

Soft X-ray emission from an anharmonic collisional nanoplasma by a laser–nanocluster interaction

2021 ◽  
Vol 87 (3) ◽  
Author(s):  
R. Nemati Siahmazgi ◽  
S. Jafari
Keyword(s):  
Electric Field ◽  
Laser Beam ◽  
Resonant Frequency ◽  
Restoring Force ◽  
Cluster Radius ◽  
X Ray ◽  
Nonlinear Restoring Force ◽  
Cluster Temperature ◽  
Argon Clusters ◽  
Helium Neon

The purpose of the present paper is to investigate the generation of soft X-ray emission from an anharmonic collisional nanoplasma by a laser–nanocluster interaction. The electric field of the laser beam interacts with the nanocluster and leads to ionization of the cluster atoms, which then produces a nanoplasma. Because of the nonlinear restoring force in an anharmonic nanoplasma, the fluctuations and heating rate of, as well as the power radiated by, the electrons in the nanocluster plasma will be notably different from those arising from a linear restoring force. By comparing the nonlinear restoring force state (which arises from an anharmonic cluster) with that of the linear restoring force (in harmonic clusters), the cluster temperature specifically changes at the resonant frequency relative to the linear restoring force, while the variation of the anharmonic cluster radius is almost identical to that of the harmonic cluster radius. In addition, it is revealed that a sharp peak of X-ray emission arises after some picoseconds in deuterium, helium, neon and argon clusters.

Fabrication of high aspect ratio nanoscale periodic structures by the soft X-ray interference lithography

2017 ◽  
Vol 170 ◽  
pp. 49-53 ◽  
Author(s):  
Jun Zhao ◽  
Yanqing Wu ◽  
Chaofan Xue ◽  
Shumin Yang ◽  
Liansheng Wang ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Periodic Structures ◽  
Interference Lithography ◽  
X Ray

scholarly journals Study of second harmonic emissions for characterization of laser–plasma X-ray sources

1998 ◽  
Vol 16 (2) ◽  
pp. 397-404 ◽  
Author(s):  
A. Giulietti ◽  
C. Beneduce ◽  
T. Ceccotti ◽  
D. Giulietti ◽  
L.A. Gizzi ◽  
...  
Keyword(s):  
Laser Beam ◽  
Transport Process ◽  
Energy Transport ◽  
Laser Light ◽  
Second Harmonic ◽  
Target Position ◽  
Laser Pulses ◽  
Strongly Correlated ◽  
X Ray

An investigation of second harmonic (SH) and X-ray emissions from Al plasmas produced by 3-ns, 1.064-μm laser pulses at 1014 W/cm2 is reported. The SH and X-ray yields are strongly correlated as a function of the target position with respect to the laser beam focus. The SH originates from the underdense coronal plasma and has a filamentary source, while the X-ray source is uniform. The results suggest that, although the X-ray emission is significantly enhanced by the filamentation of the laser light in the corona, there is a smoothing effect in the energy transport process toward the overdense region.

Fringe formation and coherence of a soft-x-ray laser beam illuminating a Mach–Zehnder interferometer

1995 ◽  
Vol 20 (18) ◽  
pp. 1907 ◽  
Author(s):  
P. Celliers ◽  
F. Weber ◽  
L. B. Da Silva ◽  
T. W. Barbee ◽  
R. Cauble ◽  
...  
Keyword(s):  
Laser Beam ◽  
Zehnder Interferometer ◽  
X Ray ◽  
Mach Zehnder Interferometer

scholarly journals The recent development of soft x-ray interference lithography in SSRF

2020 ◽  
Vol 2 (1) ◽  
pp. 012005
Author(s):  
Jun Zhao ◽  
Shumin Yang ◽  
Chaofan Xue ◽  
Liansheng Wang ◽  
Zhaofeng Liang ◽  
...  
Keyword(s):  
Interference Lithography ◽  
X Ray
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