Direct photo-etching of poly(methyl methacrylate) using focused extreme ultraviolet radiation from a table-top laser-induced plasma source

2007 ◽  
Vol 101 (12) ◽  
pp. 124908 ◽  
Author(s):  
Frank Barkusky ◽  
Christian Peth ◽  
Armin Bayer ◽  
Klaus Mann
Keyword(s):  
Ultraviolet Radiation ◽  
Methyl Methacrylate ◽  
Extreme Ultraviolet ◽  
Plasma Source ◽  
Poly Methyl Methacrylate ◽  
Laser Induced Plasma ◽  
Extreme Ultraviolet Radiation

A Magnetohydrodynamic System for Pumping Liquid Metal Media in a Plasma Source of Extreme Ultraviolet Radiation

2019 ◽  
Vol 62 (2) ◽  
pp. 283-288
Author(s):  
A. Yu. Vinokhodov ◽  
A. A. Yakushkin ◽  
O. F. Yakushev ◽  
M. S. Krivokorytov ◽  
V. N. Krivtsun ◽  
...  
Keyword(s):  
Liquid Metal ◽  
Ultraviolet Radiation ◽  
Extreme Ultraviolet ◽  
Plasma Source ◽  
Extreme Ultraviolet Radiation ◽  
Magnetohydrodynamic System

scholarly journals Эмиссионные свойства лазерной плазмы при ее возбуждении на молекулярно-кластерных струях углекислоты

2019 ◽  
Vol 89 (11) ◽  
pp. 1656
Author(s):  
А.Н. Нечай ◽  
А.А. Перекалов ◽  
Н.И. Чхало ◽  
Н.Н. Салащенко
Keyword(s):  
Ultraviolet Radiation ◽  
Laser Plasma ◽  
Radiation Source ◽  
Extreme Ultraviolet ◽  
Supersonic Nozzle ◽  
Plasma Source ◽  
Molecular Cluster ◽  
Gas Jet ◽  
Euv Emission ◽  
Extreme Ultraviolet Radiation

The paper presents the results of studies of a gas-jet laser-plasma source of extreme ultraviolet radiation (EUV) based on a conical supersonic nozzle. Molecular cluster CO2 jets were used as targets. By changing the parameters of the gas at the nozzle entrance, various modes of gas outflow were obtained, the influence of these modes on the emission and technical characteristics of the radiation source was studied. An experimentally shown is an increase in EUV emission with an increase in the amount of clustered matter in the jet. A possible relationship was observed between the increase in the intensity of EUV radiation with an increase in the number of clustered matter in the jet.

Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection

2018 ◽  
Vol 189 (03) ◽  
pp. 323-334 ◽  
Author(s):  
D.B. Abramenko ◽  
P.S. Antsiferov ◽  
D.I. Astakhov ◽  
Aleksandr Yu. Vinokhodov ◽  
Il'ya Yu. Vichev ◽  
...  
Keyword(s):  
Ultraviolet Radiation ◽  
Extreme Ultraviolet ◽  
Mask Inspection ◽  
Extreme Ultraviolet Radiation

scholarly journals Generation of coherent phonons by coherent extreme ultraviolet radiation in a transient grating experiment

2018 ◽  
Vol 113 (22) ◽  
pp. 221905 ◽  
Author(s):  
A. A. Maznev ◽  
F. Bencivenga ◽  
A. Cannizzo ◽  
F. Capotondi ◽  
R. Cucini ◽  
...  
Keyword(s):  
Ultraviolet Radiation ◽  
Extreme Ultraviolet ◽  
Transient Grating ◽  
Coherent Phonons ◽  
Extreme Ultraviolet Radiation

scholarly journals IR-assisted ionization of helium by attosecond extreme ultraviolet radiation

2010 ◽  
Vol 12 (1) ◽  
pp. 013008 ◽  
Author(s):  
P Ranitovic ◽  
X M Tong ◽  
B Gramkow ◽  
S De ◽  
B DePaola ◽  
...  
Keyword(s):  
Ultraviolet Radiation ◽  
Extreme Ultraviolet ◽  
Extreme Ultraviolet Radiation
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