Dielectric charging in radio frequency microelectromechanical system capacitive switches: A study of material properties and device performance

2007 ◽  
Vol 90 (23) ◽  
pp. 233507 ◽  
Author(s):  
G. Papaioannou ◽  
J. Papapolymerou ◽  
P. Pons ◽  
R. Plana
Keyword(s):  
Radio Frequency ◽  
Material Properties ◽  
Device Performance ◽  
Capacitive Switches ◽  
Microelectromechanical System ◽  
Dielectric Charging

scholarly journals Assessment of dielectric charging in micro-electro-mechanical system capacitive switches

2013 ◽  
Vol 26 (3) ◽  
pp. 239-245
Author(s):  
M. Koutsoureli ◽  
L. Michalas ◽  
G. Papaioannou
Keyword(s):  
Mechanical System ◽  
Material Properties ◽  
Micro Electro Mechanical System ◽  
Capacitive Switches ◽  
Metal Insulator ◽  
Dielectric Charging ◽  
Metal Insulator Metal ◽  
Simultaneous Assessment

The assessment of dielectric charging in MEMS capacitive switches is investigated. The information can be obtained only from simultaneous assessment of Metal-Insulator-Metal capacitance and MEMS capacitive switches the former allowing the determination of material properties and the latter of the device.

Effect of space charge polarization in radio frequency microelectromechanical system capacitive switch dielectric charging

2006 ◽  
Vol 89 (10) ◽  
pp. 103512 ◽  
Author(s):  
G. J. Papaioannou ◽  
M. Exarchos ◽  
V. Theonas ◽  
J. Psychias ◽  
G. Konstantinidis ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Space Charge ◽  
Space Charge Polarization ◽  
Capacitive Switch ◽  
Microelectromechanical System ◽  
Dielectric Charging ◽  
Charge Polarization
Sign in / Sign up

Export Citation Format

Share Document