Nonvolatile polycrystalline silicon thin-film-transistor memory with oxide/nitride/oxide stack gate dielectrics and nanowire channels

Shih-Ching Chen; Ting-Chang Chang; Po-Tsun Liu; Yung-Chun Wu; Ping-Hung Yeh; Chi-Feng Weng; S. M. Sze; Chun-Yen Chang; Chen-Hsin Lien

doi:10.1063/1.2715443

Nonvolatile polycrystalline silicon thin-film-transistor memory with oxide/nitride/oxide stack gate dielectrics and nanowire channels

Applied Physics Letters ◽

10.1063/1.2715443 ◽

2007 ◽

Vol 90 (12) ◽

pp. 122111 ◽

Cited By ~ 26

Author(s):

Shih-Ching Chen ◽

Ting-Chang Chang ◽

Po-Tsun Liu ◽

Yung-Chun Wu ◽

Ping-Hung Yeh ◽

...

Keyword(s):

Thin Film ◽

Polycrystalline Silicon ◽

Gate Dielectrics ◽

Thin Film Transistor ◽

Silicon Thin Film ◽

Nitride Oxide

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Two-bit effect of trigate nanowires polycrystalline silicon thin-film-transistor nonvolatile memory with oxide/nitride/oxide gate dielectrics

Applied Physics Letters ◽

10.1063/1.2910460 ◽

2008 ◽

Vol 92 (16) ◽

pp. 163506 ◽

Cited By ~ 8

Author(s):

Yung-Chun Wu ◽

Min-Feng Hung ◽

Chin-Wei Chang ◽

Po-Wen Su

Keyword(s):

Thin Film ◽

Polycrystalline Silicon ◽

Nonvolatile Memory ◽

Gate Dielectrics ◽

Thin Film Transistor ◽

Silicon Thin Film ◽

Nitride Oxide

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Nonvolatile low-temperature polycrystalline silicon thin-film-transistor memory devices with oxide-nitride-oxide stacks

Applied Physics Letters ◽

10.1063/1.2736293 ◽

2007 ◽

Vol 90 (18) ◽

pp. 182115 ◽

Cited By ~ 13

Author(s):

Po-Tsun Liu ◽

C. S. Huang ◽

C. W. Chen

Keyword(s):

Thin Film ◽

Low Temperature ◽

Polycrystalline Silicon ◽

Thin Film Transistor ◽

Memory Devices ◽

Silicon Thin Film ◽

Nitride Oxide

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Nonvolatile Polycrystalline-Silicon Thin-Film-Transistor Silicon–Oxide–Nitride–Oxide–Silicon Memory with Periodical Finlike Channels Fabricated Using Nanoimprint Technology

Applied Physics Express ◽

10.7567/apex.6.024201 ◽

2013 ◽

Vol 6 (2) ◽

pp. 024201 ◽

Cited By ~ 2

Author(s):

Henry J. H. Chen ◽

Chien-Jen Huang

Keyword(s):

Thin Film ◽

Polycrystalline Silicon ◽

Silicon Oxide ◽

Thin Film Transistor ◽

Silicon Thin Film ◽

Nitride Oxide

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Nickel Nanocrystals Embedded in Metal–Alumina–Nitride–Oxide–Silicon Type Low-Temperature Polycrystalline-Silicon Thin-Film Transistor for Low-Voltage Nonvolatile Memory Application

Japanese Journal of Applied Physics ◽

10.1143/jjap.50.06gf12 ◽

2011 ◽

Vol 50 (6) ◽

pp. 06GF12 ◽

Cited By ~ 1

Author(s):

Terry Tai-Jui Wang ◽

Yu-Cheng Liu ◽

Chien-Hung Wu ◽

Tien-Lin Lu ◽

Ing-Jar Hsieh ◽

...

Keyword(s):

Thin Film ◽

Low Temperature ◽

Polycrystalline Silicon ◽

Nonvolatile Memory ◽

Low Voltage ◽

Thin Film Transistor ◽

Silicon Thin Film ◽

Nitride Oxide

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Low-Temperature Polycrystalline Silicon Thin-Film-Transistor with Fluorinated High-k HfO2 Gate Dielectrics by HF Dip and CF4 Plasma

10.7567/ssdm.2008.p-1-7 ◽

2008 ◽

Author(s):

C. W. Chen ◽

C. S. Lai

Keyword(s):

Thin Film ◽

Low Temperature ◽

Polycrystalline Silicon ◽

Gate Dielectrics ◽

Thin Film Transistor ◽

Silicon Thin Film ◽

High K

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Memory characteristics of laser-crystallized polycrystalline-silicon silicon-oxide-nitride-oxide-silicon thin-film transistor with location-controlled grain boundary perpendicular to the channel

Applied Physics Letters ◽

10.1063/1.4724314 ◽

2012 ◽

Vol 100 (24) ◽

pp. 244103 ◽

Cited By ~ 1

Author(s):

I-Che Lee ◽

Chun-Chien Tsai ◽

Hsu-Hang Kuo ◽

Po-Yu Yang ◽

Chao-Lung Wang ◽

...

Keyword(s):

Thin Film ◽

Grain Boundary ◽

Polycrystalline Silicon ◽

Silicon Oxide ◽

Thin Film Transistor ◽

Silicon Thin Film ◽

Nitride Oxide ◽

Silicon Silicon ◽

Memory Characteristics

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Nickel Nanocrystals Embedded in Metal–Alumina–Nitride–Oxide–Silicon Type Low-Temperature Polycrystalline-Silicon Thin-Film Transistor for Low-Voltage Nonvolatile Memory Application

Japanese Journal of Applied Physics ◽

10.7567/jjap.50.06gf12 ◽

2011 ◽

Vol 50 (6S) ◽

pp. 06GF12 ◽

Cited By ~ 3

Author(s):

Terry Tai-Jui Wang ◽

Yu-Cheng Liu ◽

Chien-Hung Wu ◽

Tien-Lin Lu ◽

Ing-Jar Hsieh ◽

...

Keyword(s):

Thin Film ◽

Low Temperature ◽

Polycrystalline Silicon ◽

Nonvolatile Memory ◽

Low Voltage ◽

Thin Film Transistor ◽

Silicon Thin Film ◽

Nitride Oxide

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A high-performance polycrystalline silicon thin film transistor with a silicon nitride gate insulator

IEEE Transactions on Electron Devices ◽

10.1109/16.735734 ◽

1998 ◽

Vol 45 (12) ◽

pp. 2548-2551 ◽

Cited By ~ 27

Author(s):

K.H. Lee ◽

J.K. Park ◽

Jin Jang

Keyword(s):

Thin Film ◽

Silicon Nitride ◽

Polycrystalline Silicon ◽

High Performance ◽

Thin Film Transistor ◽

Gate Insulator ◽

Silicon Thin Film

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A Center-Offset Polycrystalline-Silicon Thin-Film Transistor With ${\rm n}^{+}$ Amorphous-Silicon Contacts

IEEE Electron Device Letters ◽

10.1109/led.2008.2008448 ◽

2009 ◽

Vol 30 (1) ◽

pp. 36-38 ◽

Cited By ~ 5

Author(s):

J. H. Oh ◽

D. H. Kang ◽

W. H. Park ◽

J. Jang ◽

Y. J. Chang ◽

...

Keyword(s):

Thin Film ◽

Amorphous Silicon ◽

Polycrystalline Silicon ◽

Thin Film Transistor ◽

Silicon Thin Film

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Data- and Gate-Line-Sharing Pixel Structure and Driving Method for Low-Cost Polycrystalline Silicon Thin Film Transistor Liquid Crystal Displays

Japanese Journal of Applied Physics ◽

10.1143/jjap.46.1375 ◽

2007 ◽

Vol 46 (3B) ◽

pp. 1375-1379 ◽

Cited By ~ 2

Author(s):

Young-Ja Kim ◽

Il-Hun Jeong ◽

Han-Jun Kim ◽

Oh-Kyong Kwon

Keyword(s):

Thin Film ◽

Liquid Crystal ◽

Polycrystalline Silicon ◽

Low Cost ◽

Thin Film Transistor ◽

Liquid Crystal Displays ◽

Silicon Thin Film

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