Study of copper diffusion through a ruthenium thin film by photoemission electron microscopy

2007 ◽  
Vol 90 (11) ◽  
pp. 111906 ◽  
Author(s):  
Wei Wei ◽  
S. L. Parker ◽  
Y.-M. Sun ◽  
J. M. White ◽  
Gang Xiong ◽  
...  
2006 ◽  
Vol 914 ◽  
Author(s):  
Wayne P. Hess ◽  
Gang Xiong ◽  
Y.-M. Sun ◽  
Alan G. Joly ◽  
Kenneth M. Beck ◽  
...  

AbstractWe demonstrate the efficacy of Photoemission Electron Microscopy (PEEM) as a tool to detect metal diffusion processes at nanoscale spatial resolution in real time. For a sample comprising a nominally 1 nm physical vapor-deposited (PVD) Ru thin film covering a thick Cu substrate, we have observed the appearance of bright features on a dark background as the temperature is monotonically increased and irradiated with photons from a Hg arc lamp. These bright features are the result of a lower work function due to Cu diffusion through the Ru film.


Author(s):  
G. F. Rempfer

In photoelectron microscopy (PEM), also called photoemission electron microscopy (PEEM), the image is formed by electrons which have been liberated from the specimen by ultraviolet light. The electrons are accelerated by an electric field before being imaged by an electron lens system. The specimen is supported on a planar electrode (or the electrode itself may be the specimen), and the accelerating field is applied between the specimen, which serves as the cathode, and an anode. The accelerating field is essentially uniform except for microfields near the surface of the specimen and a diverging field near the anode aperture. The uniform field forms a virtual image of the specimen (virtual specimen) at unit lateral magnification, approximately twice as far from the anode as is the specimen. The diverging field at the anode aperture in turn forms a virtual image of the virtual specimen at magnification 2/3, at a distance from the anode of 4/3 the specimen distance. This demagnified virtual image is the object for the objective stage of the lens system.


2017 ◽  
Vol 23 (S1) ◽  
pp. 1504-1505
Author(s):  
Taisuke Ohta ◽  
Morgann Berg ◽  
Kunttal Keyshar ◽  
Jason M. Kephart ◽  
Thomas E. Beechem ◽  
...  

Nano Letters ◽  
2017 ◽  
Vol 17 (2) ◽  
pp. 1034-1041 ◽  
Author(s):  
Hongxuan Guo ◽  
Evgheni Strelcov ◽  
Alexander Yulaev ◽  
Jian Wang ◽  
Narayana Appathurai ◽  
...  

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