High temperature stability of lanthanum silicate dielectric on Si (001)
Keyword(s):
2006 ◽
Vol 153
(9)
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pp. F210
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Keyword(s):
2006 ◽
Vol 317-318
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pp. 501-504
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2010 ◽
Vol 30
(6)
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pp. 1287-1295
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