p-type Zn1−xMgxO films with Sb doping by radio-frequency magnetron sputtering

Peng Wang; Nuofu Chen; Zhigang Yin; Ruixuan Dai; Yiming Bai

doi:10.1063/1.2388254

p-type Zn1−xMgxO films with Sb doping by radio-frequency magnetron sputtering

Applied Physics Letters ◽

10.1063/1.2388254 ◽

2006 ◽

Vol 89 (20) ◽

pp. 202102 ◽

Cited By ~ 45

Author(s):

Peng Wang ◽

Nuofu Chen ◽

Zhigang Yin ◽

Ruixuan Dai ◽

Yiming Bai

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Sb Doping ◽

P Type

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Shallow acceptor and hydrogen impurity in p-type arsenic-doped ZnMgO films grown by radio frequency magnetron sputtering

Semiconductor Science and Technology ◽

10.1088/0268-1242/25/8/085009 ◽

2010 ◽

Vol 25 (8) ◽

pp. 085009 ◽

Cited By ~ 10

Author(s):

J C Fan ◽

G W Ding ◽

S Fung ◽

Z Xie ◽

Y C Zhong ◽

...

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Hydrogen Impurity ◽

Shallow Acceptor ◽

P Type

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Microstructural properties of phosphorus-doped p-type ZnO grown by radio-frequency magnetron sputtering

Applied Physics Letters ◽

10.1063/1.2936962 ◽

2008 ◽

Vol 93 (11) ◽

pp. 111905 ◽

Cited By ~ 35

Author(s):

Min-Suk Oh ◽

Dae-Kue Hwang ◽

Yong-Seok Choi ◽

Jang-Won Kang ◽

Seong-Ju Park ◽

...

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Microstructural Properties ◽

Radio Frequency Magnetron Sputtering ◽

P Type ◽

Phosphorus Doped

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Physical Properties of p-Type Tin Monoxide Films Deposited at Low Temperature by Radio Frequency Magnetron Sputtering

Applied Physics Express ◽

10.1143/apex.4.071101 ◽

2011 ◽

Vol 4 (7) ◽

pp. 071101 ◽

Cited By ~ 17

Author(s):

Toshihiko Toyama ◽

Yuichi Seo ◽

Takafumi Konishi ◽

Hiroaki Okamoto ◽

Yasuo Tsutsumi

Keyword(s):

Low Temperature ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Physical Properties ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

P Type ◽

Tin Monoxide

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Nitrogen-doped p-type ZnO films prepared from nitrogen gas radio-frequency magnetron sputtering

Journal of Applied Physics ◽

10.1063/1.2337766 ◽

2006 ◽

Vol 100 (5) ◽

pp. 053705 ◽

Cited By ~ 82

Author(s):

Ming-Lung Tu ◽

Yan-Kuin Su ◽

Chun-Yang Ma

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Zno Films ◽

Radio Frequency Magnetron Sputtering ◽

Nitrogen Gas ◽

Nitrogen Doped ◽

P Type

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Arsenic doped p-type zinc oxide films grown by radio frequency magnetron sputtering

Journal of Applied Physics ◽

10.1063/1.3236578 ◽

2009 ◽

Vol 106 (7) ◽

pp. 073709 ◽

Cited By ~ 37

Author(s):

J. C. Fan ◽

C. Y. Zhu ◽

S. Fung ◽

Y. C. Zhong ◽

K. S. Wong ◽

...

Keyword(s):

Zinc Oxide ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Oxide Films ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Zinc Oxide Films ◽

P Type

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P-doped p-type ZnO films deposited on Si substrate by radio-frequency magnetron sputtering

Applied Physics Letters ◽

10.1063/1.2193798 ◽

2006 ◽

Vol 88 (15) ◽

pp. 152102 ◽

Cited By ~ 60

Author(s):

P. Wang ◽

NuoFu Chen ◽

Z. G. Yin

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Zno Films ◽

Radio Frequency Magnetron Sputtering ◽

Si Substrate ◽

P Type

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Characterization of amorphous p-type transparent CuFeO2 thin films prepared by radio frequency magnetron sputtering method at room temperature

Thin Solid Films ◽

10.1016/j.tsf.2015.04.066 ◽

2015 ◽

Vol 589 ◽

pp. 17-21 ◽

Cited By ~ 12

Author(s):

Zanhong Deng ◽

Xiaodong Fang ◽

Xi Wang ◽

Suzhen Wu ◽

Weiwei Dong ◽

...

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Room Temperature ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

P Type

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Realization of p-type Se–N co-doped ZnO films by radio-frequency magnetron sputtering

Materials Letters ◽

10.1016/j.matlet.2013.07.008 ◽

2013 ◽

Vol 108 ◽

pp. 183-185 ◽

Cited By ~ 7

Author(s):

Hui Cai ◽

Hongbin Xu ◽

Zhizhen Ye ◽

Jingyun Huang

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Zno Films ◽

Radio Frequency Magnetron Sputtering ◽

Doped Zno ◽

P Type ◽

Co Doped

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Optical and electrical properties of p-type transparent conducting CuAlO2 thin film synthesized by reactive radio frequency magnetron sputtering technique

Indian Journal of Physics ◽

10.1007/s12648-010-0124-x ◽

2010 ◽

Vol 84 (10) ◽

pp. 1341-1346 ◽

Cited By ~ 16

Author(s):

B. Saha ◽

R. Thapa ◽

S. Jana ◽

K. K. Chattopadhyay

Keyword(s):

Thin Film ◽

Electrical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Optical And Electrical Properties ◽

Radio Frequency Magnetron Sputtering ◽

Transparent Conducting ◽

P Type

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Optical investigation of p-type ZnO epilayers doped with different phosphorus concentrations by radio-frequency magnetron sputtering

Applied Physics Letters ◽

10.1063/1.2767993 ◽

2007 ◽

Vol 91 (6) ◽

pp. 061903 ◽

Cited By ~ 30

Author(s):

B. J. Kwon ◽

H. S. Kwack ◽

S. K. Lee ◽

Y. H. Cho ◽

D. K. Hwang ◽

...

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Optical Investigation ◽

Radio Frequency Magnetron Sputtering ◽

P Type

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