Electronic structure and thermal stability of nitrided Hf silicate films using a direct N plasma
2015 ◽
Vol 377
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pp. 263-277
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Keyword(s):
1985 ◽
Vol 107
(24)
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pp. 6874-6879
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2007 ◽
Vol 111
(49)
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pp. 18204-18213
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2014 ◽
Vol 370
◽
pp. 1-15
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Keyword(s):