scholarly journals In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al2O3

2006 ◽  
Vol 89 (13) ◽  
pp. 131505 ◽  
Author(s):  
S. B. S. Heil ◽  
P. Kudlacek ◽  
E. Langereis ◽  
R. Engeln ◽  
M. C. M. van de Sanden ◽  
...  
Keyword(s):  
Reaction Mechanism ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
In Situ Reaction ◽  
Layer Deposition

In Situ Reaction Mechanism Studies on the New tBuN=M(NEt2)3 -Water and tBuN=M(NEt2)3 - Ozone (M = Nb,Ta) Atomic Layer Deposition Processes

2012 ◽  
Vol 24 (9) ◽  
pp. 1555-1561 ◽  
Author(s):  
Yoann Tomczak ◽  
Kjell Knapas ◽  
Markku Sundberg ◽  
Markku Leskelä ◽  
Mikko Ritala
Keyword(s):  
Reaction Mechanism ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
In Situ Reaction ◽  
Layer Deposition ◽  
Deposition Processes

In Situ Reaction Mechanism Studies on Atomic Layer Deposition of AlxSiyOz from Trimethylaluminium, Hexakis(ethylamino)disilane, and Water

2012 ◽  
Vol 24 (20) ◽  
pp. 3859-3867 ◽  
Author(s):  
Yoann Tomczak ◽  
Kjell Knapas ◽  
Suvi Haukka ◽  
Marianna Kemell ◽  
Mikko Heikkilä ◽  
...  
Keyword(s):  
Reaction Mechanism ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
In Situ Reaction ◽  
Layer Deposition

In Situ Reaction Mechanism Studies on Atomic Layer Deposition of Sb2Te3and GeTe from (Et3Si)2Te and Chlorides

2010 ◽  
Vol 22 (4) ◽  
pp. 1386-1391 ◽  
Author(s):  
Kjell Knapas ◽  
Timo Hatanpää ◽  
Mikko Ritala ◽  
Markku Leskelä
Keyword(s):  
Reaction Mechanism ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
In Situ Reaction ◽  
Layer Deposition

In Situ Reaction Mechanism Studies on Ozone-Based Atomic Layer Deposition of Al2O3 and HfO2

2010 ◽  
Vol 2 (2) ◽  
pp. 347-350 ◽  
Author(s):  
Martin Rose ◽  
Jaakko Niinistö ◽  
Ingolf Endler ◽  
Johann W. Bartha ◽  
Peter Kücher ◽  
...  
Keyword(s):  
Reaction Mechanism ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
In Situ Reaction ◽  
Layer Deposition
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