Depth resolution improvement in secondary ion mass spectrometry analysis using metal cluster complex ion bombardment

M. Tomita; T. Kinno; M. Koike; H. Tanaka; S. Takeno; Y. Fujiwara; K. Kondou; Y. Teranishi; H. Nonaka; T. Fujimoto; A. Kurokawa; S. Ichimura

doi:10.1063/1.2266995

Depth resolution improvement in secondary ion mass spectrometry analysis using metal cluster complex ion bombardment

Applied Physics Letters ◽

10.1063/1.2266995 ◽

2006 ◽

Vol 89 (5) ◽

pp. 053123 ◽

Cited By ~ 28

Author(s):

M. Tomita ◽

T. Kinno ◽

M. Koike ◽

H. Tanaka ◽

S. Takeno ◽

...

Keyword(s):

Mass Spectrometry ◽

Secondary Ion Mass Spectrometry ◽

Metal Cluster ◽

Depth Resolution ◽

Mass Spectrometry Analysis ◽

Cluster Complex ◽

Spectrometry Analysis ◽

Resolution Improvement ◽

Secondary Ion ◽

Complex Ion

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Improvement of Depth Resolution in Secondary Ion Mass Spectrometry Analysis Using Multiresolution Deconvolution

Japanese Journal of Applied Physics ◽

10.1143/jjap.48.066503 ◽

2009 ◽

Vol 48 (6) ◽

pp. 066503 ◽

Cited By ~ 2

Author(s):

M'hamed Boulakroune ◽

Djamel Benatia ◽

Tahar Kezai

Keyword(s):

Mass Spectrometry ◽

Secondary Ion Mass Spectrometry ◽

Depth Resolution ◽

Mass Spectrometry Analysis ◽

Spectrometry Analysis ◽

Ion Mass Spectrometry ◽

Secondary Ion

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Multiscale deconvolution using wavelet transform for improving the depth resolution in secondary ion mass spectrometry analysis

2008 2nd International Conference on Signals, Circuits and Systems ◽

10.1109/icscs.2008.4746882 ◽

2008 ◽

Author(s):

M'hamed Boulakroune ◽

Djamel Benatia ◽

Ahmed El Oualkadi

Keyword(s):

Mass Spectrometry ◽

Wavelet Transform ◽

Secondary Ion Mass Spectrometry ◽

Depth Resolution ◽

Mass Spectrometry Analysis ◽

Spectrometry Analysis ◽

Ion Mass Spectrometry ◽

Secondary Ion

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Secondary Ion Mass Spectrometry of Organic Thin Films Using Metal-Cluster-Complex Ion Source

Japanese Journal of Applied Physics ◽

10.1143/jjap.45.l987 ◽

2006 ◽

Vol 45 (No. 36) ◽

pp. L987-L990 ◽

Cited By ~ 18

Author(s):

Yukio Fujiwara ◽

Kouji Kondou ◽

Hidehiko Nonaka ◽

Naoaki Saito ◽

Hiroshi Itoh ◽

...

Keyword(s):

Mass Spectrometry ◽

Thin Films ◽

Secondary Ion Mass Spectrometry ◽

Metal Cluster ◽

Organic Thin Films ◽

Ion Source ◽

Cluster Complex ◽

Ion Mass Spectrometry ◽

Secondary Ion ◽

Complex Ion

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Characteristics of a Metal-Cluster-Complex Ion Beam and Its Application to Secondary Ion Mass Spectrometry (SIMS)

Hyomen Kagaku ◽

10.1380/jsssj.31.593 ◽

2010 ◽

Vol 31 (11) ◽

pp. 593-598

Author(s):

Yukio FUJIWARA ◽

Hidehiko NONAKA ◽

Naoaki SAITO ◽

Atsushi SUZUKI ◽

Hiroshi ITOH ◽

...

Keyword(s):

Mass Spectrometry ◽

Secondary Ion Mass Spectrometry ◽

Metal Cluster ◽

Ion Beam ◽

Cluster Complex ◽

Ion Mass Spectrometry ◽

Secondary Ion ◽

Complex Ion

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Static secondary ion mass spectrometry analysis of UV photopolymerization in diacetylene thin films

Langmuir ◽

10.1021/la00059a010 ◽

1991 ◽

Vol 7 (11) ◽

pp. 2454-2459 ◽

Cited By ~ 5

Author(s):

Paula A. Cornelio-Clark ◽

Joseph A. Gardella

Keyword(s):

Mass Spectrometry ◽

Thin Films ◽

Secondary Ion Mass Spectrometry ◽

Mass Spectrometry Analysis ◽

Spectrometry Analysis ◽

Ion Mass Spectrometry ◽

Secondary Ion

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Quantitative static Time-of-Flight Secondary Ion Mass Spectrometry analysis of anionic minority species in microelectronic substrates

Applied Surface Science ◽

10.1016/j.apsusc.2008.06.045 ◽

2008 ◽

Vol 255 (4) ◽

pp. 1415-1418 ◽

Cited By ~ 3

Author(s):

X. Ravanel ◽

C. Trouiller ◽

M. Juhel ◽

C. Wyon ◽

L.F.Tz. Kwakman ◽

...

Keyword(s):

Mass Spectrometry ◽

Secondary Ion Mass Spectrometry ◽

Time Of Flight ◽

Mass Spectrometry Analysis ◽

Spectrometry Analysis ◽

Ion Mass Spectrometry ◽

Minority Species ◽

Secondary Ion

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Summary Abstract: High sputter rate secondary ion mass spectrometry analysis of insulators used in microelectronics and lightwave applications

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.575189 ◽

1988 ◽

Vol 6 (3) ◽

pp. 2082-2084 ◽

Cited By ~ 6

Author(s):

F. A. Stevie ◽

V. V. S. Rana ◽

A. S. Harrus ◽

T. H. Briggs ◽

Perry Skeath

Keyword(s):

Mass Spectrometry ◽

Secondary Ion Mass Spectrometry ◽

Mass Spectrometry Analysis ◽

Spectrometry Analysis ◽

Ion Mass Spectrometry ◽

Secondary Ion

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Time of flight-secondary ion mass spectrometry analysis of protein adsorption on a polyvinylidene difluoride surface modified by ion irradiation

Colloids and Surfaces B Biointerfaces ◽

10.1016/j.colsurfb.2016.08.029 ◽

2016 ◽

Vol 148 ◽

pp. 249-254 ◽

Cited By ~ 2

Author(s):

Shigeto Okuji ◽

Hideaki Kitazawa ◽

Yoshihiko Takeda

Keyword(s):

Mass Spectrometry ◽

Protein Adsorption ◽

Secondary Ion Mass Spectrometry ◽

Ion Irradiation ◽

Time Of Flight ◽

Mass Spectrometry Analysis ◽

Polyvinylidene Difluoride ◽

Spectrometry Analysis ◽

Surface Modified ◽

Secondary Ion

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Calculation of Membrane Lipid Ratios Using Single-Pixel Time-of-Flight Secondary Ion Mass Spectrometry Analysis

Analytical Chemistry ◽

10.1021/acs.analchem.5b01456 ◽

2015 ◽

Vol 87 (15) ◽

pp. 7795-7802 ◽

Cited By ~ 1

Author(s):

Rainer Kassenböhmer ◽

Felix Draude ◽

Martin Körsgen ◽

Andreas Pelster ◽

Heinrich F. Arlinghaus

Keyword(s):

Mass Spectrometry ◽

Secondary Ion Mass Spectrometry ◽

Time Of Flight ◽

Membrane Lipid ◽

Mass Spectrometry Analysis ◽

Spectrometry Analysis ◽

Lipid Ratios ◽

Ion Mass Spectrometry ◽

Secondary Ion ◽

Single Pixel

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Metal cluster complex primary ion beam source for secondary ion mass spectrometry (SIMS)

Vacuum ◽

10.1016/j.vacuum.2009.03.034 ◽

2009 ◽

Vol 84 (5) ◽

pp. 544-549 ◽

Cited By ~ 12

Author(s):

Yukio Fujiwara ◽

Kouji Watanabe ◽

Hidehiko Nonaka ◽

Naoaki Saito ◽

Atsushi Suzuki ◽

...

Keyword(s):

Mass Spectrometry ◽

Secondary Ion Mass Spectrometry ◽

Metal Cluster ◽

Ion Beam ◽

Cluster Complex ◽

Beam Source ◽

Ion Mass Spectrometry ◽

Secondary Ion

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