Density functional theory study of deep traps in silicon nitride memories

2006 ◽  
Vol 89 (5) ◽  
pp. 053511 ◽  
Author(s):  
Max Petersen ◽  
Yakov Roizin
Keyword(s):  
Density Functional Theory ◽  
Silicon Nitride ◽  
Density Functional ◽  
Density Functional Theory Study ◽  
Functional Theory ◽  
Deep Traps

Density Functional Theory Study on the Modification of Silicon Nitride Surface by Fluorine-Containing Molecules

2021 ◽  
pp. 149481
Author(s):  
Tanzia Chowdhury ◽  
Romel Hidayat ◽  
Hye-Lee Kim ◽  
Tirta Rona Mayangsari ◽  
Seongjae Cho ◽  
...  
Keyword(s):  
Density Functional Theory ◽  
Silicon Nitride ◽  
Density Functional ◽  
Density Functional Theory Study ◽  
Functional Theory
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