Density functional theory study on the full ALD process of silicon nitride thin film deposition via BDEAS or BTBAS and NH3

2014 ◽  
Vol 16 (34) ◽  
pp. 18501 ◽  
Author(s):  
Liang Huang ◽  
Bo Han ◽  
Bing Han ◽  
Agnes Derecskei-Kovacs ◽  
Manchao Xiao ◽  
...  
Keyword(s):  
Thin Film ◽  
Density Functional Theory ◽  
Silicon Nitride ◽  
Density Functional ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Density Functional Theory Study ◽  
Functional Theory

Density Functional Theory Study on the Modification of Silicon Nitride Surface by Fluorine-Containing Molecules

2021 ◽  
pp. 149481
Author(s):  
Tanzia Chowdhury ◽  
Romel Hidayat ◽  
Hye-Lee Kim ◽  
Tirta Rona Mayangsari ◽  
Seongjae Cho ◽  
...  
Keyword(s):  
Density Functional Theory ◽  
Silicon Nitride ◽  
Density Functional ◽  
Density Functional Theory Study ◽  
Functional Theory
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