Interfacial properties of high-k dielectric CaZrOx films deposited by pulsed laser deposition

2006 ◽  
Vol 88 (18) ◽  
pp. 182907 ◽  
Author(s):  
X. Y. Qiu ◽  
H. W. Liu ◽  
F. Fang ◽  
M. J. Ha ◽  
Z. G. Liu ◽  
...  
Keyword(s):  
Pulsed Laser Deposition ◽  
Pulsed Laser ◽  
Interfacial Properties ◽  
Laser Deposition ◽  
High K ◽  
High K Dielectric

Pulsed laser deposition and characterization of Hf-based high-k dielectric thin films

2007 ◽  
Vol 515 (16) ◽  
pp. 6548-6551 ◽  
Author(s):  
Mehmet Alper Sahiner ◽  
Joseph C. Woicik ◽  
Peng Gao ◽  
Patrick McKeown ◽  
Mark C. Croft ◽  
...  
Keyword(s):  
Thin Films ◽  
Pulsed Laser Deposition ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Dielectric Thin Films ◽  
High K ◽  
High K Dielectric
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