Improvement in electrical properties and thermal stability of low-temperature-processed Hf–Al–O gate dielectrics
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2011 ◽
Vol 26
(7)
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pp. 075006
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2015 ◽
Vol 39
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pp. 366-376
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2017 ◽
Vol 52
(10)
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pp. 5894-5907
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2018 ◽
Vol 101
(10)
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pp. 4608-4614
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