Transport of ionized metal atoms in high-power pulsed magnetron discharges assisted by inductively coupled plasma

2006 ◽  
Vol 88 (2) ◽  
pp. 021501 ◽  
Author(s):  
S. Konstantinidis ◽  
J. P. Dauchot ◽  
M. Ganciu ◽  
M. Hecq
Keyword(s):  
High Power ◽  
Inductively Coupled Plasma ◽  
Inductively Coupled ◽  
Metal Atoms ◽  
Pulsed Magnetron

Global model analysis of Ar inductively coupled plasma driven by a 150 kHz-band high-power pulse burst

2019 ◽  
Vol 58 (SA) ◽  
pp. SAAB06
Author(s):  
Yuma Saito ◽  
Kodai Shibata ◽  
Katsuyuki Takahashi ◽  
Seiji Mukaigawa ◽  
Koichi Takaki ◽  
...  
Keyword(s):  
High Power ◽  
Inductively Coupled Plasma ◽  
Model Analysis ◽  
Global Model ◽  
Pulse Burst ◽  
Inductively Coupled ◽  
Power Pulse ◽  
High Power Pulse

Luminescent properties of ZnO thin films treated by pulse-modulated high-power inductively coupled plasma

2011 ◽  
Vol 257 (16) ◽  
pp. 7156-7159
Author(s):  
J.B. Wang ◽  
Z.S. Hu ◽  
X.L. Zhong ◽  
Y.J. Zhang ◽  
T. Ishigaki ◽  
...  
Keyword(s):  
Thin Films ◽  
High Power ◽  
Inductively Coupled Plasma ◽  
Luminescent Properties ◽  
Zno Thin Films ◽  
Inductively Coupled

Nonthermal and nonequilibrium effects in high-power pulsed ICP and application to surface modification of materials

2002 ◽  
Vol 74 (3) ◽  
pp. 435-439 ◽  
Author(s):  
T. Ishigaki ◽  
N. Okada ◽  
N. Ohashi ◽  
H. Haneda ◽  
T. Sakuta
Keyword(s):  
Zinc Oxide ◽  
High Power ◽  
Inductively Coupled Plasma ◽  
Power Level ◽  
Green Emission ◽  
Thermal Reduction ◽  
High Concentration ◽  
Physicochemical Condition ◽  
Inductively Coupled ◽  
Pulse Off Time

Newly developed pulse-modulated high-power inductively coupled plasma (ICP) is expected to offer the unique physicochemical condition, such as the increased concentration of chemically reactive species, as well as the appropriate heat flux for materials processing. Two kinds of oxide materials, titanium and zinc oxide, were placed at the downstream of Ar­H2 ICP and irradiated in the plasma of continuous (CN) and pulse-modulated (PM) modes. The CN-ICP irradiation at the position close to the plasma tail gave rise to the thermal reduction of oxides. In the PM-ICP irradiation, the degree of thermal reduction depended on the lower power level during pulse-off time, as well as the total electric power. Irradiation in PM-ICP led to the increased formation of oxygen vacancies in titanium dioxide. In the case of zinc oxide, the UV emission efficiency was improved by PM-ICP irradiation, while the green emission became predominant by CN-ICP irradiation at the appropriate position. Induced effects in the two oxides by PM-ICP would be related to the high concentration of hydrogen radicals in the plasma.

Excitation Temperature in High-Power Nitrogen Microwave-Induced Plasma at Atmospheric Pressure

1997 ◽  
Vol 51 (10) ◽  
pp. 1496-1499 ◽  
Author(s):  
Kenichi Ogura ◽  
Hirofumi Yamada ◽  
Yoshitaka Sato ◽  
Yukio Okamoto
Keyword(s):  
Electron Density ◽  
High Power ◽  
Atmospheric Pressure ◽  
Inductively Coupled Plasma ◽  
Local Thermodynamic Equilibrium ◽  
Rotational Temperature ◽  
Nitrogen Plasma ◽  
Excitation Temperature ◽  
Inductively Coupled ◽  
Microwave Induced Plasma

Excitation temperature, rotational temperature, and electron density were obtained for a high-power (1-kW) microwave-induced nitrogen plasma (N2 MIP) at atmospheric pressure generated by an Okamoto cavity. With 1 kW input microwave power, an excitation temperature of 5500 K, a rotational temperature of 5000 K, and an electron density in the 1013 range were measured. Excitation and rotational temperatures were much closer than is the case with the commonly used argon inductively coupled plasma, suggesting that this N2 MIP is closer to local thermodynamic equilibrium (thermal).

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