Transient response of piezoelectric thin-film vibration sensor under pulse excitation

2006 ◽  
Vol 99 (1) ◽  
pp. 014107 ◽  
Author(s):  
Zhaochun Yang ◽  
Qing-Ming Wang
Keyword(s):  
Thin Film ◽  
Transient Response ◽  
Vibration Sensor ◽  
Pulse Excitation ◽  
Piezoelectric Thin Film

Preparation of YbAlN piezoelectric thin film by sputtering and influence of Yb concentration on properties and crystal structure

2021 ◽  
Vol 47 (11) ◽  
pp. 16029-16036
Author(s):  
Masato Uehara ◽  
Yuki Amano ◽  
Sri Ayu Anggraini ◽  
Kenji Hirata ◽  
Hiroshi Yamada ◽  
...  
Keyword(s):  
Thin Film ◽  
Crystal Structure ◽  
Piezoelectric Thin Film

Transparent piezoelectric thin-film devices: Pb(Zr, Ti)O3 thin films on glass substrates

2021 ◽  
Vol 327 ◽  
pp. 112786
Author(s):  
Kazuki Ueda ◽  
Sang-Hyo Kweon ◽  
Hirotaka Hida ◽  
Yoshiharu Mukouyama ◽  
Isaku Kanno
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Glass Substrates ◽  
Piezoelectric Thin Film ◽  
Thin Film Devices

scholarly journals Total Ionizing Dose Effects on Piezoelectric Thin-Film Cantilevers With Oxide Electrodes

2017 ◽  
Vol 64 (7) ◽  
pp. 1135-1143 ◽  
Author(s):  
Ryan Q. Rudy ◽  
Kyle M. Grove ◽  
Manuel Rivas ◽  
Jonathon Guerrier ◽  
Cory Cress ◽  
...  
Keyword(s):  
Thin Film ◽  
Total Ionizing Dose ◽  
Oxide Electrodes ◽  
Dose Effects ◽  
Piezoelectric Thin Film ◽  
Total Ionizing Dose Effects

Frequency and transient response of yoke flux for 45/55 NiFe and CoTaZr thin film write heads

1999 ◽  
Vol 35 (5) ◽  
pp. 2508-2510 ◽  
Author(s):  
J. Jury ◽  
P. George ◽  
J.H. Judy
Keyword(s):  
Thin Film ◽  
Transient Response ◽  
Write Heads

Pulsed DC magnetron sputtered piezoelectric thin film aluminum nitride – Technology and piezoelectric properties

2014 ◽  
Vol 116 (3) ◽  
pp. 034102 ◽  
Author(s):  
C. Stoeckel ◽  
C. Kaufmann ◽  
R. Hahn ◽  
R. Schulze ◽  
D. Billep ◽  
...  
Keyword(s):  
Thin Film ◽  
Aluminum Nitride ◽  
Piezoelectric Properties ◽  
Pulsed Dc ◽  
Piezoelectric Thin Film

A Low-Range Drift-Free Bio-compatible Pressure Sensor Based on P(VDF-TrFE) Piezoelectric Thin Film

2009 ◽  
Vol 1222 ◽  
Author(s):  
Xiaoyang Li ◽  
Timothy Reissman ◽  
Fan Yu ◽  
Edwin C. Kan
Keyword(s):  
Thin Film ◽  
Blood Pressure ◽  
Pressure Sensor ◽  
Equivalent Circuit Model ◽  
Swelling Pressure ◽  
Pressure Monitoring ◽  
Sensing Element ◽  
Piezoelectric Resonance ◽  
Piezoelectric Thin Film

AbstractA low-range pressure sensor (0-100kPa) based on the P(VDF-TrFE) piezoelectric thin film is proposed, where the long-term drift is eliminated by operating near the piezoelectric resonance. The pressure sensor is designed for blood pressure and tissue swelling pressure monitoring. The poled 50μm±1μm P(VDF-TrFE) copolymer film is used as the sensing element, with all fabrication and assembly materials biocompatible. A modified Butterworth-Van Dyke (BVD) [1] equivalent circuit model is used to characterize the sensor behavior. The pressure sensor exhibits negligible drift in weeks of operation. The device shows a sensitivity of 0.038MHz/kPa resonance frequency shift under stress, which leads to a maximum readout change of 1.1%/kPa in the present setup.

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