Extraction of single-ion beams from helicon ion source in high plasma density operation mode: Experiment and simulation
2006 ◽
Vol 77
(3)
◽
pp. 03B901
◽
Keyword(s):
Two-dimensional modeling of high plasma density inductively coupled sources for materials processing
1994 ◽
Vol 12
(1)
◽
pp. 461
◽
Keyword(s):
Keyword(s):
Keyword(s):
Keyword(s):
1999 ◽
Vol 27
(1)
◽
pp. 62-63
◽