Study of the sputtered Cu atoms and Cu+ ions in a hollow cathode glow discharge using a hybrid model

2005 ◽  
Vol 98 (3) ◽  
pp. 033303 ◽  
Author(s):  
N. Baguer ◽  
A. Bogaerts
Keyword(s):  
Glow Discharge ◽  
Hybrid Model ◽  
Hollow Cathode ◽  
Cu Ions

Comparison of plasma characteristics of high-power pulsed sputtering glow discharge and hollow-cathode discharge

2020 ◽  
Vol 60 (1) ◽  
pp. 015501
Author(s):  
Shoki Abe ◽  
Katsuyuki Takahashi ◽  
Seiji Mukaigawa ◽  
Koichi Takaki ◽  
Ken Yukimura
Keyword(s):  
Glow Discharge ◽  
High Power ◽  
Hollow Cathode ◽  
Hollow Cathode Discharge ◽  
Plasma Characteristics

Plasma Treatment of Polyethylene Powder Particles in a Hollow Cathode Glow Discharge

2009 ◽  
Vol 6 (S1) ◽  
pp. S392-S396 ◽  
Author(s):  
Meike Quitzau ◽  
Matthias Wolter ◽  
Holger Kersten
Keyword(s):  
Glow Discharge ◽  
Plasma Treatment ◽  
Hollow Cathode ◽  
Powder Particles ◽  
Polyethylene Powder

Non-Self-Sustained Hollow-Cathode Glow Discharge at Low Burning Voltages

2019 ◽  
Vol 62 (4) ◽  
pp. 563-568
Author(s):  
V. V. Denisov ◽  
Yu. Kh. Akhmadeev ◽  
N. N. Koval ◽  
I. V. Lopatin ◽  
E. V. Ostroverkhov
Keyword(s):  
Glow Discharge ◽  
Hollow Cathode

Generation of Plasma in Non-Self-Sustained Glow Discharge With Hollow Cathode for Nitriding Inner Surfaces of Elongated and Complex Shaped Cavities

2020 ◽  
Vol 48 (6) ◽  
pp. 2050-2059
Author(s):  
Danil Yu. Ignatov ◽  
Ilya V. Lopatin ◽  
Vladimir V. Denisov ◽  
Nikolay N. Koval ◽  
Yuri H. Ahmadeev
Keyword(s):  
Glow Discharge ◽  
Hollow Cathode

scholarly journals A novel method for producing NH4+ reagent ions in the hollow cathode glow discharge ion source of PTR-MS instruments

2020 ◽  
Vol 447 ◽  
pp. 116254 ◽  
Author(s):  
Markus Müller ◽  
Felix Piel ◽  
Rene Gutmann ◽  
Philipp Sulzer ◽  
Eugen Hartungen ◽  
...  
Keyword(s):  
Glow Discharge ◽  
Hollow Cathode ◽  
Ion Source ◽  
Novel Method

scholarly journals Theoretical Study of Plasma Using Different Dimension of Hollow Cathode

2019 ◽  
Vol 5 (1) ◽  
pp. 30-34
Author(s):  
L. N. Mishra ◽  
K. Khanal
Keyword(s):  
Glow Discharge ◽  
Hollow Cathode ◽  
Theoretical Study ◽  
Plasma Processing ◽  
Theoretical Work ◽  
Plasma Potential ◽  
Gas Pressure ◽  
Floating Potential ◽  
Discharge Behavior

This article deals about the theoretical study on DC hollow cathode glow discharge using different hollow cathode geometry. The mechanism of discharge is analyzed at various gas pressure and radial configuration. The dependence of temperature on gas pressure has been elucidated with the help of Scotty limit. Discharge behavior with radius has also been explained. It is revealed that floating potential increases as gas pressure increases whereas plasma potential decreases as gas pressure increases. This theoretical work resembles with the experimentally measured results. This work might be useful for the plasma processing for industrial purposes.

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