Structural, electrical, and optical properties of transparent gallium oxide thin films grown by plasma-enhanced atomic layer deposition

2005 ◽  
Vol 98 (2) ◽  
pp. 023504 ◽  
Author(s):  
F. K. Shan ◽  
G. X. Liu ◽  
W. J. Lee ◽  
G. H. Lee ◽  
I. S. Kim ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Atomic Layer Deposition ◽  
Gallium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Electrical And Optical Properties ◽  
Layer Deposition

Remote plasma-enhanced atomic layer deposition of gallium oxide thin films with NH3 plasma pretreatment

2019 ◽  
Vol 40 (1) ◽  
pp. 012806 ◽  
Author(s):  
Hui Hao ◽  
Xiao Chen ◽  
Zhengcheng Li ◽  
Yang Shen ◽  
Hu Wang ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Gallium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Remote Plasma ◽  
Layer Deposition ◽  
Plasma Pretreatment

Broadband optical properties of aluminium zinc oxide thin films prepared by spatial atomic layer deposition

2018 ◽  
Vol 653 ◽  
pp. 267-273 ◽  
Author(s):  
Daniel B. Fullager ◽  
Glenn D. Boreman ◽  
Carolyn D. Ellinger ◽  
Tino Hofmann
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Optical Properties ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition

Low Thermal Budget Heteroepitaxial Gallium Oxide Thin Films Enabled by Atomic Layer Deposition

2020 ◽  
Vol 12 (39) ◽  
pp. 44225-44237
Author(s):  
Elham Rafie Borujeny ◽  
Oles Sendetskyi ◽  
Michael D. Fleischauer ◽  
Kenneth C. Cadien
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Gallium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Thermal Budget ◽  
Layer Deposition ◽  
Low Thermal Budget

Low temperature growth of gallium oxide thin films via plasma enhanced atomic layer deposition

2017 ◽  
Vol 46 (47) ◽  
pp. 16551-16561 ◽  
Author(s):  
Richard O'Donoghue ◽  
Julian Rechmann ◽  
Morteza Aghaee ◽  
Detlef Rogalla ◽  
Hans-Werner Becker ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Gallium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Temperature Growth ◽  
Low Temperature Growth ◽  
Layer Deposition

Lowest temperature to date for the ALD growth of Ga2O3 thin films and the 2nd highest GPC regarding Ga2O3 ALD.

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