Low temperature growth of gallium oxide thin films via plasma enhanced atomic layer deposition

2017 ◽  
Vol 46 (47) ◽  
pp. 16551-16561 ◽  
Author(s):  
Richard O'Donoghue ◽  
Julian Rechmann ◽  
Morteza Aghaee ◽  
Detlef Rogalla ◽  
Hans-Werner Becker ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Gallium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Temperature Growth ◽  
Low Temperature Growth ◽  
Layer Deposition

Lowest temperature to date for the ALD growth of Ga2O3 thin films and the 2nd highest GPC regarding Ga2O3 ALD.

Low-temperature growth of gallium oxide thin films by plasma-enhanced atomic layer deposition

2020 ◽  
Vol 38 (2) ◽  
pp. 022404 ◽  
Author(s):  
Ali Mahmoodinezhad ◽  
Christoph Janowitz ◽  
Franziska Naumann ◽  
Paul Plate ◽  
Hassan Gargouri ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Gallium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Temperature Growth ◽  
Low Temperature Growth ◽  
Layer Deposition

Low Temperature Growth of Beryllium Oxide Thin Films Prepared via Plasma Enhanced Atomic Layer Deposition

2021 ◽  
pp. 151405
Author(s):  
Yoonseo Jang ◽  
Dohwan Jung ◽  
Prakash R. Sultane ◽  
Eric S. Larsen ◽  
Christopher W. Bielawski ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Beryllium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Temperature Growth ◽  
Low Temperature Growth ◽  
Layer Deposition

scholarly journals Low-temperature growth of AlN thin films by plasma-enhanced atomic layer deposition

2013 ◽  
Vol 62 (11) ◽  
pp. 117302
Author(s):  
Feng Jia-Heng ◽  
Tang Li-Dan ◽  
Liu Bang-Wu ◽  
Xia Yang ◽  
Wang Bing
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Temperature Growth ◽  
Low Temperature Growth ◽  
Layer Deposition

Extra-Low Temperature Growth of ZnO Thin Films by Atomic Layer Deposition

2008 ◽  
Vol 53 (9(5)) ◽  
pp. 2880-2883 ◽  
Author(s):  
E. Guziewicz ◽  
M. Godlewski ◽  
K. Kopalko ◽  
I. A. Kowalik ◽  
S. Yatsunenko ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Zno Thin Films ◽  
Temperature Growth ◽  
Low Temperature Growth ◽  
Layer Deposition

Low-Temperature Growth of ZnO Thin Films by Atomic Layer Deposition

2007 ◽  
Vol 50 (6) ◽  
pp. 1716 ◽  
Author(s):  
E. H. Kim ◽  
D. H. Lee ◽  
B. H. Chung ◽  
H. S. Kim ◽  
Y. Kim ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Zno Thin Films ◽  
Temperature Growth ◽  
Low Temperature Growth ◽  
Layer Deposition
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