Radiative ballistic phonon transport in silicon-nitride membranes at low temperatures

2005 ◽  
Vol 86 (25) ◽  
pp. 251903 ◽  
Author(s):  
H. F. C. Hoevers ◽  
M. L. Ridder ◽  
A. Germeau ◽  
M. P. Bruijn ◽  
P. A. J. de Korte ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Low Temperatures ◽  
Phonon Transport

The electrophysical properties of silicon nitride at low temperatures

1987 ◽  
Vol 61 (9) ◽  
pp. 4566-4570 ◽  
Author(s):  
N. A. Asadullayev ◽  
N. B. Brandt ◽  
S. M. Chudinov ◽  
S. N. Kozlov ◽  
I. Ciric
Keyword(s):  
Silicon Nitride ◽  
Low Temperatures ◽  
Electrophysical Properties

The Use of Disordered Interlayers to Enhance Nucleation of Silicon Nitride During Chemical Vapor Deposition

1995 ◽  
Vol 403 ◽  
Author(s):  
Rachel E. Boekenhauer ◽  
Frederick S. Lauten ◽  
Brian W. Sheldon
Keyword(s):  
Chemical Vapor Deposition ◽  
Silicon Nitride ◽  
Vapor Deposition ◽  
Low Temperatures ◽  
Chemical Vapor ◽  
Crystalline Material ◽  
Sem And Tem ◽  
Crystalline Films ◽  
Favorable Conditions

AbstractThin, disordered interlayers were used to enhance the nucleation of Si3N4. Continuous crystalline films were formed at relatively low temperatures (<1250°C) by using an amorphous, Sirich interlayer. The interlayer was produced by varying the CVD conditions (i.e., by using multistep processing). Samples were characterized with XPS, SEM, and TEM with concurrent EELS. The results indicate that the nucleation of crystalline material is very sensitive to the structure and composition of the disordered interlayers. Also, the structure and composition of the interlayers evolve during growth, such that crystalline material only nucleates when the interlayer provides favorable conditions.

Anisotropic etching of silicon nitride at low temperatures by synchrotron radiation

1994 ◽  
Vol 79-80 ◽  
pp. 122-128 ◽  
Author(s):  
Osama Kitamura ◽  
Takashi Goto ◽  
Shingo Terakado ◽  
Shigeo Suzuki ◽  
Tetsuji Sekitani ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Synchrotron Radiation ◽  
Low Temperatures ◽  
Anisotropic Etching
Sign in / Sign up

Export Citation Format

Share Document