Electrical behavior of 4H-SiC metal-oxide-semiconductor structures with Al2O3 as gate dielectric

2005 ◽  
Vol 97 (12) ◽  
pp. 124507 ◽  
Author(s):  
A. Paskaleva ◽  
R. R. Ciechonski ◽  
M. Syväjärvi ◽  
E. Atanassova ◽  
R. Yakimova
Keyword(s):  
Metal Oxide ◽  
Gate Dielectric ◽  
Metal Oxide Semiconductor ◽  
Oxide Semiconductor ◽  
Electrical Behavior ◽  
Semiconductor Structures

scholarly journals Application of Metal-Oxide-Semiconductor structures containing silicon nanocrystals in radiation dosimetry

Open Physics ◽  
2015 ◽  
Vol 13 (1) ◽  
Author(s):  
Diana Nesheva ◽  
Nikola Nedev ◽  
Mario Curiel ◽  
Valeri Dzhurkov ◽  
Abraham Arias ◽  
...  
Keyword(s):  
Metal Oxide ◽  
Silicon Nanocrystals ◽  
Radiation Dosimetry ◽  
Gate Dielectric ◽  
Gate Dielectrics ◽  
Metal Oxide Semiconductor ◽  
Oxide Semiconductor ◽  
Semiconductor Structures ◽  
Annealing Conditions ◽  
Silicon Structures

AbstractThis article makes a brief review of the most important results obtained by the authors and their collaborators during the last four years in the field of the development of metal-insulator-silicon structures with dielectric film containing silicon nanocrystals, which are suitable for applications in radiation dosimetry. The preparation of SiOx films is briefly discussed and the annealing conditions used for the growth of silicon nanocrystals are presented. A two-step annealing process for preparation of metal-oxide-semiconductor structures with three-layer gate dielectrics is described. Electron Microscopy investigations prove the Si nanocrystals growth, reveal the crystal spatial distribution in the gate dielectric and provide evidences for the formation of a top SiO2 layerwhen applying the two-step annealing. Two types of MOS structures with three region gate dielectricswere fabricated and characterized by high frequency capacitance/conductancevoltage (C/G-V) measurements. The effect of gamma and ultraviolet radiation on the flatband voltage of preliminary charged metal-oxide-semiconductor structures is investigated and discussed.

GaN quantum-dots integrated in the gate dielectric of metal-oxide-semiconductor structures for charge-storage applications

2013 ◽  
Vol 102 (5) ◽  
pp. 053117 ◽  
Author(s):  
P. Dimitrakis ◽  
P. Normand ◽  
C. Bonafos ◽  
E. Papadomanolaki ◽  
E. Iliopoulos
Keyword(s):  
Quantum Dots ◽  
Metal Oxide ◽  
Gate Dielectric ◽  
Metal Oxide Semiconductor ◽  
Oxide Semiconductor ◽  
Charge Storage ◽  
Semiconductor Structures

Interface/border trap characterization of Al2O3/AlN/GaN metal-oxide-semiconductor structures with an AlN interfacial layer

2015 ◽  
Vol 106 (5) ◽  
pp. 051605 ◽  
Author(s):  
Shenghou Liu ◽  
Shu Yang ◽  
Zhikai Tang ◽  
Qimeng Jiang ◽  
Cheng Liu ◽  
...  
Keyword(s):  
Metal Oxide ◽  
Interfacial Layer ◽  
Metal Oxide Semiconductor ◽  
Oxide Semiconductor ◽  
Semiconductor Structures
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