Integrated tungsten nanofiber field emission cathodes selectively grown by nanoscale electron beam-induced deposition

2005 ◽  
Vol 86 (18) ◽  
pp. 183106 ◽  
Author(s):  
X. Yang ◽  
M. L. Simpson ◽  
S. J. Randolph ◽  
P. D. Rack ◽  
L. R. Baylor ◽  
...  
2004 ◽  
Vol 16 (6) ◽  
pp. 597-603 ◽  
Author(s):  
Fumihito Arai ◽  
◽  
Pou Liu ◽  
Lixin Dong ◽  
Toshio Fukuda ◽  
...  

Field emission properties of individual multi-walled carbon nanotubes (MWNTs) were studied in nanorobotic manipulation and electron-beam-induced deposition (EBID). Nanotube emitters are constructed by picking up and assembling individual nanotubes on a commercially available atomic force microscope (AFM) cantilever or a tungsten probe. The relationship between field emission current and interelectrode distance was obtained by changing the distance between the tip of the nanotube emitter and the counterpart anode, which can be potentially applied as the principle for an approaching sensor to detect nanometer scale distance by observing field emission current in real time. Field emission current on a microampere scale from a CNT emitter was shown to be strong enough for EBID without obviously degrading emitters. Deposit topology was related to current density or the emitter shape, suggesting that information on emitter geometry could be obtained from EBID deposits. Energy dispersive X-ray spectrometry (EDS) analysis of deposits from W(CO)6showed that the tungsten mass exceeds 80% on the average among compositions. Much higher voltage may degrade the emitter, and saturated current may be used to adjust the emitter length in a controlled way.


Instruments ◽  
2019 ◽  
Vol 3 (4) ◽  
pp. 57
Author(s):  
Gerard Lawler ◽  
Kunal Sanwalka ◽  
Yumeng Zhuang ◽  
Victor Yu ◽  
Timo Paschen ◽  
...  

Electron beams are essential tools in modern science. They are ubiquitous in fields ranging from microscopy to the creation of coherent ultra-fast X-rays to lithography. To keep pace with demand, electron beam brightness must be continually increased. One of the main strategic aims of the Center for Bright Beams (CBB), a National Science Foundation Science and Technology Center, is to increase brightness from photocathodes by two orders of magnitude. Improving the state-of-the-art for photoemission-based cathodes is one possibility. Several factors have led to an alternative design becoming an increasing necessity; the nanoscale structure. Field emission sources from nano-tips would be an ideal candidate were it not for their low current and damage threshold. A 1-dimensional extended nano-fabricated blade, i.e., a projected tip, can solve the problems inherent in both designs. The novel geometry has been demonstrated to produce extremely high brightness electron beam bunches and is significantly more robust and easier to manufacture than traditional photocathodes. Theory indicates electron emission up to keV energies. We thus present a system of diagnostics capable of analyzing the cathodes and assessing their viability. The diagnostics are designed to measure the electron spectrum up to keV energies, with sub meV resolution at <100 eV, mean transverse energy (MTE), emission uniformity, and cathode lifetime. We also report preliminary data on total extracted charge and maximum detectable electron energy with a simplified retarding field spectrometer.


2007 ◽  
Vol 124-126 ◽  
pp. 139-142 ◽  
Author(s):  
Kazuo Furuya ◽  
Masaki Takeguchi ◽  
Kazutaka Mitsuishi

Electron beam induced deposition (EBID) was carried out with gas introduction systems attached to field emission scanning electron microscope (FE-SEM). Using iron carbonyl and ferrocene, three dimensional (3-D) antenna structures were fabricated in the range of 30-50 nm in diameter and 500-1000 nm in size. Post-deposition annealing of iron nanostructures resulted in the formation of crystalline alpha-iron and iron carbide phases. The iron concentration was controlled by the partial pressure of iron carbonyl and ferrocene. Electron holography observation with field emission transmission electron microscopy (FE-TEM) revealed that the remanent magnetic flux density Br of the nanostructures also depends on the iron concentration.


2005 ◽  
Vol 17 (4) ◽  
pp. 475-482 ◽  
Author(s):  
Pou Liu ◽  
◽  
Fumihito Arai ◽  
Lixin Dong ◽  
Toshio Fukuda ◽  
...  

To reduce energy consumption by carbon nanotubes (CNTs) used as emitters in applications such as field emission display, and electron-beam-induced deposition (EBID), nano-sized metallic super-nanoparticles of ruthenium dioxide are decorated on the surface of CNTs. We studied field emission properties and found that the work voltage is 23% lower than that of as-grown CNT emitters. To obtain conductive nanostructures, electron-beam-induced deposition using an individual multiwalled carbon nanotube (MWNT) emitter decorated with ruthenium dioxide is realized by introducing tungsten hexacarbonyl (W(CO)6) as a precursor. The tungsten mass in deposits is rich at 98.89% as determined by energy x-ray dispersive spectrometer (EDS). We thus obtained nearly pure-metal deposits.


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