scholarly journals Scanning acoustic force microscopy characterization of thermal expansion effects on the electromechanical properties of film bulk acoustic resonators

2005 ◽  
Vol 86 (8) ◽  
pp. 084102 ◽  
Author(s):  
A. San Paulo ◽  
X. Liu ◽  
J. Bokor
Keyword(s):  
Thermal Expansion ◽  
Electromechanical Properties ◽  
Acoustic Resonators ◽  
Force Microscopy ◽  
Film Bulk Acoustic Resonators ◽  
Film Bulk ◽  
Microscopy Characterization

Electromechanical properties of Al0.9Sc0.1N thin films evaluated at 2.5 GHz film bulk acoustic resonators

2011 ◽  
Vol 99 (9) ◽  
pp. 092903 ◽  
Author(s):  
Ramin Matloub ◽  
Alvaro Artieda ◽  
Cosmin Sandu ◽  
Evgeny Milyutin ◽  
Paul Muralt
Keyword(s):  
Thin Films ◽  
Electromechanical Properties ◽  
Acoustic Resonators ◽  
Film Bulk Acoustic Resonators ◽  
Film Bulk

Development of an X-Band Filter Using Air-Gap-Type Film Bulk Acoustic Resonators

2008 ◽  
Vol 47 (5) ◽  
pp. 4007-4010 ◽  
Author(s):  
Masanori Ueda ◽  
Motoaki Hara ◽  
Shinji Taniguchi ◽  
Tsuyoshi Yokoyama ◽  
Tokihiro Nishihara ◽  
...  
Keyword(s):  
Air Gap ◽  
Acoustic Resonators ◽  
Band Filter ◽  
X Band ◽  
Film Bulk Acoustic Resonators ◽  
Film Bulk
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