Passivation of organic light-emitting diodes with aluminum oxide thin films grown by plasma-enhanced atomic layer deposition

2004 ◽  
Vol 85 (21) ◽  
pp. 4896-4898 ◽  
Author(s):  
Sun Jin Yun ◽  
Young-Wook Ko ◽  
Jung Wook Lim
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Aluminum Oxide ◽  
Light Emitting Diodes ◽  
Atomic Layer ◽  
Organic Light Emitting Diodes ◽  
Oxide Thin Films ◽  
Light Emitting ◽  
Organic Light ◽  
Layer Deposition

Realization of highly-dense Al2O3 gas barrier for top-emitting organic light-emitting diodes by atomic layer deposition

RSC Advances ◽  
2015 ◽  
Vol 5 (127) ◽  
pp. 104613-104620 ◽  
Author(s):  
Min Li ◽  
Dongyu Gao ◽  
Shuo Li ◽  
Zhongwei Zhou ◽  
Jianhua Zou ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Light Emitting Diodes ◽  
Atomic Layer ◽  
Organic Light Emitting Diodes ◽  
Gas Barrier ◽  
Light Emitting ◽  
Organic Light ◽  
Layer Deposition ◽  
Thin Film Encapsulation

In this paper Al2O3 films are prepared with a method of atomic layer deposition (ALD) as the thin film encapsulation technology for top-emitting organic light-emitting diodes (TE-OLED).

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