High-quality boron-doped homoepitaxial diamond grown by high-power microwave-plasma chemical-vapor deposition

Tokuyuki Teraji; Kazuya Arima; Hideki Wada; Toshimichi Ito

doi:10.1063/1.1805180

High-quality boron-doped homoepitaxial diamond grown by high-power microwave-plasma chemical-vapor deposition

Journal of Applied Physics ◽

10.1063/1.1805180 ◽

2004 ◽

Vol 96 (10) ◽

pp. 5906-5908 ◽

Cited By ~ 33

Author(s):

Tokuyuki Teraji ◽

Kazuya Arima ◽

Hideki Wada ◽

Toshimichi Ito

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Plasma Chemical ◽

High Quality ◽

High Power Microwave ◽

Plasma Chemical Vapor Deposition ◽

Boron Doped ◽

Power Microwave

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SiC nanofibers grown by high power microwave plasma chemical vapor deposition

Applied Surface Science ◽

10.1016/s0169-4332(03)00118-1 ◽

2003 ◽

Vol 212-213 ◽

pp. 378-382 ◽

Cited By ~ 26

Author(s):

Shin-ichi Honda ◽

Yang-Gyu Baek ◽

Takashi Ikuno ◽

Hidekazu Kohara ◽

Mitsuhiro Katayama ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

High Power ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Plasma Chemical ◽

High Power Microwave ◽

Plasma Chemical Vapor Deposition ◽

Power Microwave

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Homoepitaxial diamond growth by high-power microwave-plasma chemical vapor deposition

Journal of Crystal Growth ◽

10.1016/j.jcrysgro.2004.08.005 ◽

2004 ◽

Vol 271 (3-4) ◽

pp. 409-419 ◽

Cited By ~ 69

Author(s):

Tokuyuki Teraji ◽

Toshimichi Ito

Keyword(s):

Chemical Vapor Deposition ◽

High Power ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Diamond Growth ◽

Plasma Chemical ◽

High Power Microwave ◽

Plasma Chemical Vapor Deposition ◽

Power Microwave

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Synthesis of boron-doped homoepitaxial single crystal diamond by microwave plasma chemical vapor deposition

Diamond and Related Materials ◽

10.1016/j.diamond.2008.01.120 ◽

2008 ◽

Vol 17 (7-10) ◽

pp. 1320-1323 ◽

Cited By ~ 15

Author(s):

R. Ramamurti ◽

M. Becker ◽

T. Schuelke ◽

T. Grotjohn ◽

D. Reinhard ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Single Crystal ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

Boron Doped ◽

Single Crystal Diamond

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Controlled synthesis of high quality micro/nano-diamonds by microwave plasma chemical vapor deposition

Diamond and Related Materials ◽

10.1016/j.diamond.2008.09.020 ◽

2009 ◽

Vol 18 (1) ◽

pp. 51-55 ◽

Cited By ~ 45

Author(s):

Alastair Stacey ◽

Igor Aharonovich ◽

Steven Prawer ◽

James E. Butler

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Controlled Synthesis ◽

Plasma Chemical ◽

High Quality ◽

Plasma Chemical Vapor Deposition

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High pressure high power microwave plasma chemical vapor deposition of large area diamond films

Thin Solid Films ◽

10.1016/s0040-6090(97)00421-5 ◽

1997 ◽

Vol 308-309 ◽

pp. 141-146 ◽

Cited By ~ 9

Author(s):

H.A Naseem ◽

M.S Haque ◽

M.A Khan ◽

A.P Malshe ◽

W.D Brown

Keyword(s):

High Pressure ◽

Vapor Deposition ◽

Microwave Plasma ◽

Diamond Films ◽

Chemical Vapor ◽

Large Area ◽

Plasma Chemical ◽

High Power Microwave ◽

Plasma Chemical Vapor Deposition ◽

Power Microwave

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Cytotoxicity of Boron-Doped Nanocrystalline Diamond Films Prepared by Microwave Plasma Chemical Vapor Deposition

Plasma Science and Technology ◽

10.1088/1009-0630/17/7/08 ◽

2015 ◽

Vol 17 (7) ◽

pp. 574-578

Author(s):

Dan Liu ◽

Li Gou ◽

Junguo Ran ◽

Hong Zhu ◽

Xiang Zhang

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Microwave Plasma ◽

Diamond Films ◽

Chemical Vapor ◽

Nanocrystalline Diamond ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

Boron Doped ◽

Nanocrystalline Diamond Films

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Deposition of thick boron-doped homoepitaxial single crystal diamond by microwave plasma chemical vapor deposition

Diamond and Related Materials ◽

10.1016/j.diamond.2009.01.031 ◽

2009 ◽

Vol 18 (5-8) ◽

pp. 704-706 ◽

Cited By ~ 13

Author(s):

R. Ramamurti ◽

M. Becker ◽

T. Schuelke ◽

T.A. Grotjohn ◽

D.K. Reinhard ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Single Crystal ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

Boron Doped ◽

Single Crystal Diamond

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Microwave plasma chemical vapor deposition synthesis of boron-doped carbon nanotube

Physica C Superconductivity ◽

10.1016/j.physc.2010.01.037 ◽

2010 ◽

Vol 470 ◽

pp. S608-S609 ◽

Cited By ~ 7

Author(s):

T. Watanabe ◽

S. Tsuda ◽

T. Yamaguchi ◽

Y. Takano

Keyword(s):

Chemical Vapor Deposition ◽

Carbon Nanotube ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

Boron Doped

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Sulfur regulation of boron doping and growth behavior for high-quality diamond in microwave plasma chemical vapor deposition

Applied Physics Letters ◽

10.1063/5.0009615 ◽

2020 ◽

Vol 117 (2) ◽

pp. 022101 ◽

Cited By ~ 1

Author(s):

D. Y. Liu ◽

L. C. Hao ◽

Z. A. Chen ◽

W. K. Zhao ◽

Y. Shen ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Boron Doping ◽

Growth Behavior ◽

Plasma Chemical ◽

High Quality ◽

Plasma Chemical Vapor Deposition ◽

Sulfur Regulation

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Effects of vicinal angles from (001) surface on the Boron-doping features of high-quality homoepitaxial diamond films grown by the high-power microwave plasma chemical-vapor-deposition method

Journal of Crystal Growth ◽

10.1016/j.jcrysgro.2007.09.026 ◽

2007 ◽

Vol 309 (2) ◽

pp. 145-152 ◽

Cited By ~ 10

Author(s):

Kazuya Arima ◽

Hidetaka Miyatake ◽

Tokuyuki Teraji ◽

Toshimichi Ito

Keyword(s):

Vapor Deposition ◽

Microwave Plasma ◽

Diamond Films ◽

Chemical Vapor ◽

Boron Doping ◽

Chemical Vapor Deposition Method ◽

Plasma Chemical ◽

High Power Microwave ◽

Plasma Chemical Vapor Deposition ◽

Power Microwave

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