Transmission electron microscopy study of blisters in high-temperature annealed He and H co-implanted single-crystal silicon

2004 ◽  
Vol 85 (10) ◽  
pp. 1683-1685 ◽  
Author(s):  
S. Frabboni ◽  
G. C. Gazzadi ◽  
L. Felisari ◽  
R. Tonini ◽  
F. Corni ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
High Temperature ◽  
Single Crystal ◽  
Single Crystal Silicon ◽  
Microscopy Study ◽  
Electron Microscopy Study ◽  
Transmission Electron Microscopy Study ◽  
Crystal Silicon ◽  
Transmission Electron
Sign in / Sign up

Export Citation Format

Share Document