Synergism between low-energy neutral particles and energetic ions in the pulsed glow discharge deposition of diamond-like carbon films

2004 ◽  
Vol 85 (5) ◽  
pp. 718-720 ◽  
Author(s):  
I. V. Afanasyev-Charkin ◽  
M. Nastasi
Keyword(s):  
Glow Discharge ◽  
Carbon Films ◽  
Low Energy ◽  
Diamond Like Carbon ◽  
Energetic Ions ◽  
Pulsed Glow Discharge ◽  
Neutral Particles ◽  
Glow Discharge Deposition

Comparison of diamond-like carbon films having similar hardness deposited by glow discharge and sputtering

1992 ◽  
Vol 1 (5-6) ◽  
pp. 535-537
Author(s):  
F. Demichelis ◽  
C.F. Pirri ◽  
A. Tagliaferro ◽  
V. Barbarossa ◽  
S. Mercuri ◽  
...  
Keyword(s):  
Glow Discharge ◽  
Carbon Films ◽  
Diamond Like Carbon

Effect of H2Plasma Etching during Glow-Discharge Deposition of Amorphous Carbon Films

1986 ◽  
Vol 25 (Part 1, No. 4) ◽  
pp. 511-514 ◽  
Author(s):  
Satoshi Nishikawa ◽  
Hiroaki Kakinuma ◽  
Hisashi Fukuda ◽  
Tsukasa Watanabe ◽  
Koji Nihei
Keyword(s):  
Glow Discharge ◽  
Amorphous Carbon ◽  
Carbon Films ◽  
Amorphous Carbon Films ◽  
Glow Discharge Deposition
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