Determination of Stress in Films on Single Crystalline Silicon Substrates

1965 ◽  
Vol 36 (1) ◽  
pp. 7-10 ◽  
Author(s):  
R. Glang ◽  
R. A. Holmwood ◽  
R. L. Rosenfeld
Keyword(s):  
Crystalline Silicon ◽  
Silicon Substrates ◽  
Single Crystalline Silicon ◽  
Single Crystalline

Recombination Characteristics of Single-Crystalline Silicon Wafers with a Damaged Near-Surface Layer

2013 ◽  
Vol 58 (2) ◽  
pp. 142-150 ◽  
Author(s):  
A.V. Sachenko ◽  
◽  
V.P. Kostylev ◽  
V.G. Litovchenko ◽  
V.G. Popov ◽  
...  
Keyword(s):  
Surface Layer ◽  
Crystalline Silicon ◽  
Silicon Wafers ◽  
Single Crystalline Silicon ◽  
Near Surface ◽  
Single Crystalline
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