Three‐anode accelerating lens system for the field emission scanning electron microscope

1974 ◽  
Vol 45 (5) ◽  
pp. 2336-2342 ◽  
Author(s):  
Katsuhiro Kuroda ◽  
Hirotaka Ebisui ◽  
Tatsuro Suzuki
Author(s):  
William P. Wergin ◽  
Eric F. Erbe ◽  
Terrence W. Reilly

Although the first commercial scanning electron microscope (SEM) was introduced in 1965, the limited resolution and the lack of preparation techniques initially confined biological observations to relatively low magnification images showing anatomical surface features of samples that withstood the artifacts associated with air drying. As the design of instrumentation improved and the techniques for specimen preparation developed, the SEM allowed biologists to gain additional insights not only on the external features of samples but on the internal structure of tissues as well. By 1985, the resolution of the conventional SEM had reached 3 - 5 nm; however most biological samples still required a conductive coating of 20 - 30 nm that prevented investigators from approaching the level of information that was available with various TEM techniques. Recently, a new SEM design combined a condenser-objective lens system with a field emission electron source.


Author(s):  
S. Saito ◽  
H. Todokoro ◽  
S. Nomura ◽  
T. Komoda

Field emission scanning electron microscope (FESEM) features extremely high resolution images, and offers many valuable information. But, for a specimen which gives low contrast images, lateral stripes appear in images. These stripes are resulted from signal fluctuations caused by probe current noises. In order to obtain good images without stripes, the fluctuations should be less than 1%, especially for low contrast images. For this purpose, the authors realized a noise compensator, and applied this to the FESEM.Fig. 1 shows an outline of FESEM equipped with a noise compensator. Two apertures are provided gust under the field emission gun.


Author(s):  
F. Ouyang ◽  
D. A. Ray ◽  
O. L. Krivanek

Electron backscattering Kikuchi diffraction patterns (BKDP) reveal useful information about the structure and orientation of crystals under study. With the well focused electron beam in a scanning electron microscope (SEM), one can use BKDP as a microanalysis tool. BKDPs have been recorded in SEMs using a phosphor screen coupled to an intensified TV camera through a lens system, and by photographic negatives. With the development of fiber-optically coupled slow scan CCD (SSC) cameras for electron beam imaging, one can take advantage of their high sensitivity and wide dynamic range for observing BKDP in SEM.We have used the Gatan 690 SSC camera to observe backscattering patterns in a JEOL JSM-840A SEM. The CCD sensor has an active area of 13.25 mm × 8.83 mm and 576 × 384 pixels. The camera head, which consists of a single crystal YAG scintillator fiber optically coupled to the CCD chip, is located inside the SEM specimen chamber. The whole camera head is cooled to about -30°C by a Peltier cooler, which permits long integration times (up to 100 seconds).


2021 ◽  
Vol 02 (01) ◽  
Author(s):  
Siti Khadijah Hubadillah ◽  
◽  
Norsiah Hami ◽  
Nurul Azita Salleh ◽  
Mohd Riduan Jamalludin ◽  
...  

The purpose of this work is to study the effect of kaolin particle size for the preparation of low cost ceramic membrane suspension and ceramic membrane structure. Kaolin particle size is categorized into two categories; i) ≤ 1µm and ii) ≥ 1 µm. The suspension is prepared via stirring technique under 1000 rpm at 60°C. The particle size of kaolin is characterized using field emission scanning electron microscope (FESEM) and the prepared suspension is characterized in term of its viscosity. Results indicate that the particle size gave significant effect to the viscosity of ceramic membrane suspension. Preliminary data showed that kaolin with particle size ≤ 1µm resulted ceramic membrane with dense structure.


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