scholarly journals Submillimeter-Wavelength Plasma Diagnostics For Semiconductor Manufacturing

2003 ◽  
Author(s):  
Eric C. Benck
Keyword(s):  
Plasma Diagnostics ◽  
Semiconductor Manufacturing ◽  
Submillimeter Wavelength

A Laser-Based Polarization Interferometer for Plasma Diagnostics at Submillimeter Wavelength

1997 ◽  
Vol 51 (10) ◽  
pp. 96-102
Author(s):  
Yu. Ye. Kamenev ◽  
V. K. Kiseliov ◽  
Ye. M. Kuleshov ◽  
B. N. Knyaz'kov ◽  
V. K. Kononenko ◽  
...  
Keyword(s):  
Plasma Diagnostics ◽  
Submillimeter Wavelength ◽  
Polarization Interferometer

Submillimeter-wavelength plasma chemical diagnostics for semiconductor manufacturing

2003 ◽  
Vol 21 (5) ◽  
pp. 2067 ◽  
Author(s):  
Eric C. Benck ◽  
Guerman Yu. Golubiatnikov ◽  
Gerald T. Fraser ◽  
Bing Ji ◽  
Stephen A. Motika ◽  
...  
Keyword(s):  
Semiconductor Manufacturing ◽  
Plasma Chemical ◽  
Submillimeter Wavelength

SOME REMARKS ON THE NON-EQUILIBRIUM PLASMA DIAGNOSTICS

1979 ◽  
Vol 40 (C7) ◽  
pp. C7-871-C7-872
Author(s):  
E. F. Gippius ◽  
B. I. Iljukhin ◽  
V. N. Kolesnikov
Keyword(s):  
Plasma Diagnostics ◽  
Equilibrium Plasma ◽  
Non Equilibrium

NanoProbing on 7 nm FinFET Devices in an SRAM Array: Challenges and Solutions

2019 ◽  
Author(s):  
Anqi Qiu ◽  
William Lowe ◽  
Mridul Arora
Keyword(s):  
Manufacturing Process ◽  
Semiconductor Manufacturing

Abstract Nanoprobing systems have evolved to meet the challenges from recent innovations in the semiconductor manufacturing process. This is demonstrated through an exhibition of standard SRAM measurements on TSMC 7 nm FinFET technology. SEM based nanoprober is shown to meet or exceed the requirements for measuring 7nm technology and beyond. This paper discusses in detail of the best-known methods for nanoprobing on 7nm technology.

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