Methane chemistry involved in a low-pressure electron cyclotron wave resonant plasma discharge

2003 ◽  
Vol 94 (11) ◽  
pp. 7031-7043 ◽  
Author(s):  
N. A. Morrison ◽  
C. William ◽  
W. I. Milne
Keyword(s):  
Low Pressure ◽  
Plasma Discharge ◽  
Electron Cyclotron ◽  
Electron Cyclotron Wave

Plasma diagnostics of low pressure high power impulse magnetron sputtering assisted by electron cyclotron wave resonance plasma

2012 ◽  
Vol 112 (9) ◽  
pp. 093305 ◽  
Author(s):  
Vitezslav Stranak ◽  
Ann-Pierra Herrendorf ◽  
Steffen Drache ◽  
Martin Cada ◽  
Zdenek Hubicka ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
High Power ◽  
Plasma Diagnostics ◽  
Low Pressure ◽  
Electron Cyclotron ◽  
Wave Resonance ◽  
Electron Cyclotron Wave ◽  
Resonance Plasma

Investigation of Low-Pressure Plane Plasma Discharge

2002 ◽  
Vol 10 (4) ◽  
pp. 251-261 ◽  
Author(s):  
G. Golan ◽  
A. Axelevitch ◽  
B. Sigalov ◽  
B. Gorenstein
Keyword(s):  
Low Pressure ◽  
Plasma Discharge ◽  
Plane Plasma

Plasma shape effects on sawtooth/internal kink stability and plasma shaping using electron cyclotron wave current profile tailoring in TCV

2001 ◽  
Vol 41 (11) ◽  
pp. 1663-1669 ◽  
Author(s):  
A Pochelon ◽  
F Hofmann ◽  
H Reimerdes ◽  
C Angioni ◽  
R Behn ◽  
...  
Keyword(s):  
Electron Cyclotron ◽  
Current Profile ◽  
Shape Effects ◽  
Electron Cyclotron Wave
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