Mechanical properties of periodic porous silica low-k films determined by the twin-transducer surface acoustic wave technique
2003 ◽
Vol 74
(10)
◽
pp. 4539-4541
◽
Keyword(s):
Low K
◽
2007 ◽
Keyword(s):
2008 ◽
Vol 47
(7)
◽
pp. 5400-5403
◽
Keyword(s):
1981 ◽
Vol 42
(C4)
◽
pp. C4-365-C4-368
Keyword(s):
Keyword(s):