Room-temperature 1.54 μm photoluminescence from Er-doped Si-rich silica layers obtained by reactive magnetron sputtering

2003 ◽  
Vol 94 (6) ◽  
pp. 3869-3874 ◽  
Author(s):  
F. Gourbilleau ◽  
C. Dufour ◽  
M. Levalois ◽  
J. Vicens ◽  
R. Rizk ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Room Temperature ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Silica Layers ◽  
Er Doped

Room temperature deposition of crystalline HfN thin films by DC reactive magnetron sputtering

2021 ◽  
Author(s):  
Wuttichai Phae-ngam ◽  
Tossaporn Lertvanithphol ◽  
Chanunthorn Chananonnawathorn ◽  
Rattanachai Kowong ◽  
Mati Horprathum ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Room Temperature ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Dc Reactive Magnetron Sputtering ◽  
Temperature Deposition

scholarly journals Magnetic properties of Er-doped ZnO films prepared by reactive magnetron sputtering

2010 ◽  
Vol 100 (1) ◽  
pp. 79-82 ◽  
Author(s):  
Jing Qi ◽  
Daqiang Gao ◽  
Jinhong Liu ◽  
Wenge Yang ◽  
Qi Wang ◽  
...  
Keyword(s):  
Magnetic Properties ◽  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Zno Films ◽  
Reactive Magnetron ◽  
Doped Zno ◽  
Er Doped
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