Anatase TiO2 Films with Dominant {001} Facets Fabricated by Direct-Current Reactive Magnetron Sputtering at Room Temperature: Oxygen Defects and Enhanced Visible-Light Photocatalytic Behaviors

2014 ◽  
Vol 6 (8) ◽  
pp. 5940-5946 ◽  
Author(s):  
Jian-Yun Zheng ◽  
Shan-Hu Bao ◽  
Yu Guo ◽  
Ping Jin
Keyword(s):  
Magnetron Sputtering ◽  
Visible Light ◽  
Direct Current ◽  
Room Temperature ◽  
Anatase Tio2 ◽  
Reactive Magnetron Sputtering ◽  
Tio2 Films ◽  
Reactive Magnetron ◽  
Oxygen Defects ◽  
Visible Light Photocatalytic

Room temperature deposition of crystalline HfN thin films by DC reactive magnetron sputtering

2021 ◽  
Author(s):  
Wuttichai Phae-ngam ◽  
Tossaporn Lertvanithphol ◽  
Chanunthorn Chananonnawathorn ◽  
Rattanachai Kowong ◽  
Mati Horprathum ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Room Temperature ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Dc Reactive Magnetron Sputtering ◽  
Temperature Deposition

scholarly journals INVESTIGATIONS OF TiO2 FILMS PREPARED BY REACTIVE MAGNETRON SPUTTERING

2001 ◽  
Vol 50 (7) ◽  
pp. 1390
Author(s):  
ZHAO KUN ◽  
ZHU FENG ◽  
WANG LI-FANG ◽  
MENG TIE-JUN ◽  
ZHANG BAO-CHENG ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Tio2 Films ◽  
Reactive Magnetron
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