Numerical study of Ar/CF4/N2 discharges in single- and dual-frequency capacitively coupled plasma reactors

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pp. 3748-3756 ◽  
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Keyword(s):  
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scholarly journals Modeling of Perpendicularly Driven Dual-Frequency Capacitively Coupled Plasma

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Wei Jiang ◽  
Peng Sun ◽  
Shuangyun Zhao ◽  
Yang Li
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Author(s):  
Yannick Feurprier ◽  
Katie Lutker-Lee ◽  
Vinayak Rastogi ◽  
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Vol 54 (9(5)) ◽  
pp. 317-322 ◽  
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Chang-Mo Ryu ◽  
SungHee Lee ◽  
JaeKoo Lee
Keyword(s):  
Kinetic Property ◽  
Dual Frequency ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma
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