Molecular dynamics simulations of mechanical deformation of amorphous silicon dioxide during chemical–mechanical polishing

Evgueni Chagarov; James B. Adams

doi:10.1063/1.1602551

Molecular dynamics simulations of mechanical deformation of amorphous silicon dioxide during chemical–mechanical polishing

Journal of Applied Physics ◽

10.1063/1.1602551 ◽

2003 ◽

Vol 94 (6) ◽

pp. 3853-3861 ◽

Cited By ~ 17

Author(s):

Evgueni Chagarov ◽

James B. Adams

Keyword(s):

Molecular Dynamics ◽

Silicon Dioxide ◽

Molecular Dynamics Simulations ◽

Amorphous Silicon ◽

Chemical Mechanical Polishing ◽

Mechanical Deformation ◽

Mechanical Polishing ◽

Amorphous Silicon Dioxide ◽

Dynamics Simulations

Download Full-text

Quantum Chemical Molecular Dynamics Simulations of Mechano-Chemical Reactions during Copper Chemical Mechanical Polishing Processes

ECS Meeting Abstracts ◽

10.1149/ma2012-02/3/277 ◽

2012 ◽

Keyword(s):

Molecular Dynamics ◽

Molecular Dynamics Simulations ◽

Chemical Reactions ◽

Chemical Mechanical Polishing ◽

Quantum Chemical ◽

Mechanical Polishing ◽

Dynamics Simulations ◽

Quantum Chemical Molecular Dynamics

Download Full-text

Chemical mechanical polishing mechanisms for gallium nitride: Quantum chemical molecular dynamics simulations

Proceedings of International Conference on Planarization/CMP Technology 2014 ◽

10.1109/icpt.2014.7017241 ◽

2014 ◽

Author(s):

Kentaro Kawaguchi ◽

Takehiro Aizawa ◽

Yuji Higuchi ◽

Nobuki Ozawa ◽

Momoji Kubo

Keyword(s):

Molecular Dynamics ◽

Gallium Nitride ◽

Molecular Dynamics Simulations ◽

Chemical Mechanical Polishing ◽

Quantum Chemical ◽

Mechanical Polishing ◽

Dynamics Simulations ◽

Quantum Chemical Molecular Dynamics

Download Full-text

Atomistic Mechanisms of Chemical Mechanical Polishing of a Cu Surface in Aqueous H2O2: Tight-Binding Quantum Chemical Molecular Dynamics Simulations

ACS Applied Materials & Interfaces ◽

10.1021/acsami.5b11910 ◽

2016 ◽

Vol 8 (18) ◽

pp. 11830-11841 ◽

Cited By ~ 15

Author(s):

Kentaro Kawaguchi ◽

Hiroshi Ito ◽

Takuya Kuwahara ◽

Yuji Higuchi ◽

Nobuki Ozawa ◽

...

Keyword(s):

Molecular Dynamics ◽

Molecular Dynamics Simulations ◽

Chemical Mechanical Polishing ◽

Quantum Chemical ◽

Tight Binding ◽

Mechanical Polishing ◽

Dynamics Simulations ◽

Quantum Chemical Molecular Dynamics

Download Full-text

Atomistic Insights into Cu Chemical Mechanical Polishing Mechanism in Aqueous Hydrogen Peroxide and Glycine: ReaxFF Reactive Molecular Dynamics Simulations

The Journal of Physical Chemistry C ◽

10.1021/acs.jpcc.9b08466 ◽

2019 ◽

Vol 123 (43) ◽

pp. 26467-26474 ◽

Cited By ~ 4

Author(s):

Jialin Wen ◽

Tianbao Ma ◽

Weiwei Zhang ◽

Adri C. T. van Duin ◽

Diana M. van Duin ◽

...

Keyword(s):

Molecular Dynamics ◽

Hydrogen Peroxide ◽

Molecular Dynamics Simulations ◽

Chemical Mechanical Polishing ◽

Mechanical Polishing ◽

Aqueous Hydrogen Peroxide ◽

Reactive Molecular Dynamics ◽

Dynamics Simulations

Download Full-text

Atomistic mechanisms of chemical mechanical polishing of diamond (1 0 0) in aqueous H2O2/pure H2O: Molecular dynamics simulations using reactive force field (ReaxFF)

Computational Materials Science ◽

10.1016/j.commatsci.2018.10.041 ◽

2019 ◽

Vol 157 ◽

pp. 99-106 ◽

Cited By ~ 12

Author(s):

Xiaoguang Guo ◽

Song Yuan ◽

Xiaoli Wang ◽

Zhuji Jin ◽

Renke Kang

Keyword(s):

Molecular Dynamics ◽

Force Field ◽

Molecular Dynamics Simulations ◽

Chemical Mechanical Polishing ◽

Mechanical Polishing ◽

Reactive Force ◽

Reactive Force Field ◽

Dynamics Simulations

Download Full-text

Atomistic mechanisms of Si chemical mechanical polishing in aqueous H2O2: ReaxFF reactive molecular dynamics simulations

Computational Materials Science ◽

10.1016/j.commatsci.2017.02.005 ◽

2017 ◽

Vol 131 ◽

pp. 230-238 ◽

Cited By ~ 28

Author(s):

Jialin Wen ◽

Tianbao Ma ◽

Weiwei Zhang ◽

Adri C.T. van Duin ◽

Xinchun Lu

Keyword(s):

Molecular Dynamics ◽

Molecular Dynamics Simulations ◽

Chemical Mechanical Polishing ◽

Mechanical Polishing ◽

Reactive Molecular Dynamics ◽

Dynamics Simulations

Download Full-text

Atomic-Level Material Removal Mechanisms of Si(110) Chemical Mechanical Polishing: Insights from ReaxFF Reactive Molecular Dynamics Simulations

Langmuir ◽

10.1021/acs.langmuir.0c03416 ◽

2021 ◽

Vol 37 (6) ◽

pp. 2161-2169

Author(s):

Ming Wang ◽

Fangli Duan

Keyword(s):

Molecular Dynamics ◽

Molecular Dynamics Simulations ◽

Chemical Mechanical Polishing ◽

Material Removal ◽

Atomic Level ◽

Mechanical Polishing ◽

Material Removal Mechanisms ◽

Reactive Molecular Dynamics ◽

Removal Mechanisms ◽

Dynamics Simulations

Download Full-text

Theoretical studies of amorphous silicon and hydrogenated amorphous silicon with molecular dynamics simulations

10.31274/rtd-180813-9287 ◽

1991 ◽

Author(s):

Inhee Kwon

Keyword(s):

Molecular Dynamics ◽

Molecular Dynamics Simulations ◽

Amorphous Silicon ◽

Hydrogenated Amorphous Silicon ◽

Theoretical Studies ◽

Dynamics Simulations ◽

Hydrogenated Amorphous

Download Full-text

Molecular dynamics simulations of void and helium bubble stability in amorphous silicon during heavy-ion bombardment

Journal of Applied Physics ◽

10.1063/1.1791759 ◽

2004 ◽

Vol 96 (8) ◽

pp. 4181-4188 ◽

Cited By ~ 12

Author(s):

Maria A. Okuniewski ◽

Yinon Ashkenazy ◽

Brent J. Heuser ◽

Robert S. Averback

Keyword(s):

Molecular Dynamics ◽

Molecular Dynamics Simulations ◽

Amorphous Silicon ◽

Ion Bombardment ◽

Heavy Ion ◽

Helium Bubble ◽

Dynamics Simulations

Download Full-text

Excimer Laser Crystallization Processes of Amorphous Silicon Thin Films by Using Molecular-dynamics Simulations

ISIJ International ◽

10.2355/isijinternational.50.1925 ◽

2010 ◽

Vol 50 (12) ◽

pp. 1925-1928 ◽

Cited By ~ 1

Author(s):

Shinji Munetoh ◽

Xiao Yan Ping ◽

Tomohiko Ogata ◽

Teruaki Motooka ◽

Ryo Teranishi

Keyword(s):

Thin Films ◽

Molecular Dynamics ◽

Molecular Dynamics Simulations ◽

Amorphous Silicon ◽

Excimer Laser ◽

Laser Crystallization ◽

Silicon Thin Films ◽

Excimer Laser Crystallization ◽

Dynamics Simulations

Download Full-text

Molecular dynamics simulations of mechanical deformation of amorphous silicon dioxide during chemical–mechanical polishing

Quantum Chemical Molecular Dynamics Simulations of Mechano-Chemical Reactions during Copper Chemical Mechanical Polishing Processes

Chemical mechanical polishing mechanisms for gallium nitride: Quantum chemical molecular dynamics simulations

Atomistic Mechanisms of Chemical Mechanical Polishing of a Cu Surface in Aqueous H2O2: Tight-Binding Quantum Chemical Molecular Dynamics Simulations

Atomistic Insights into Cu Chemical Mechanical Polishing Mechanism in Aqueous Hydrogen Peroxide and Glycine: ReaxFF Reactive Molecular Dynamics Simulations

Atomistic mechanisms of chemical mechanical polishing of diamond (1 0 0) in aqueous H2O2/pure H2O: Molecular dynamics simulations using reactive force field (ReaxFF)

Atomistic mechanisms of Si chemical mechanical polishing in aqueous H2O2: ReaxFF reactive molecular dynamics simulations

Atomic-Level Material Removal Mechanisms of Si(110) Chemical Mechanical Polishing: Insights from ReaxFF Reactive Molecular Dynamics Simulations

Theoretical studies of amorphous silicon and hydrogenated amorphous silicon with molecular dynamics simulations

Molecular dynamics simulations of void and helium bubble stability in amorphous silicon during heavy-ion bombardment

Excimer Laser Crystallization Processes of Amorphous Silicon Thin Films by Using Molecular-dynamics Simulations

Atomistic mechanisms of chemical mechanical polishing of diamond (1 0 0) in aqueous H2O2/pure H2O: Molecular dynamics simulations using reactive force field (ReaxFF)