Efficient, stable, corona discharge 172 nm xenon excimer light source

2003 ◽  
Vol 94 (6) ◽  
pp. 3722-3731 ◽  
Author(s):  
M. Salvermoser ◽  
D. E. Murnick
Keyword(s):  
Corona Discharge ◽  
Light Source ◽  
Excimer Light Source

scholarly journals Electron-beam–ignited, high-frequency–driven vacuum ultraviolet excimer light source

2011 ◽  
Vol 94 (5) ◽  
pp. 53001 ◽  
Author(s):  
T. Dandl ◽  
H. Hagn ◽  
T. Heindl ◽  
R. Krücken ◽  
J. Wieser ◽  
...  
Keyword(s):  
Electron Beam ◽  
Light Source ◽  
High Frequency ◽  
Vacuum Ultraviolet ◽  
Excimer Light Source

Vacuum ultraviolet rare gas excimer light source

1997 ◽  
Vol 68 (3) ◽  
pp. 1360-1364 ◽  
Author(s):  
J. Wieser ◽  
D. E. Murnick ◽  
A. Ulrich ◽  
H. A. Huggins ◽  
A. Liddle ◽  
...  
Keyword(s):  
Light Source ◽  
Vacuum Ultraviolet ◽  
Rare Gas ◽  
Excimer Light Source

High-efficiency, high-power, stable 172 nm xenon excimer light source

2003 ◽  
Vol 83 (10) ◽  
pp. 1932-1934 ◽  
Author(s):  
M. Salvermoser ◽  
D. E. Murnick
Keyword(s):  
Light Source ◽  
High Power ◽  
High Efficiency ◽  
Excimer Light Source

scholarly journals Vacuum Ultraviolet Xenon Excimer Light Source Excited by a Pulsed Jet Discharge.

1995 ◽  
Vol 23 (6) ◽  
pp. 389-395
Author(s):  
Eiji FUTAGAMI ◽  
Toshiaki TAKADA ◽  
Junji KAWANAKA ◽  
Shoichi KUBODERA ◽  
Wataru SASAKI ◽  
...  
Keyword(s):  
Light Source ◽  
Vacuum Ultraviolet ◽  
Pulsed Jet ◽  
Excimer Light Source

Dual-chamber ultra line-narrowed excimer light source for 193-nm lithography

2003 ◽  
Author(s):  
Vladimir B. Fleurov ◽  
Daniel J. Colon III ◽  
Daniel J. W. Brown ◽  
Patrick O'Keeffe ◽  
Herve Besaucele ◽  
...  
Keyword(s):  
Light Source ◽  
Dual Chamber ◽  
193 Nm ◽  
Excimer Light Source

scholarly journals Head-on Xe2* excimer light source unit with hollow lightguide

1995 ◽  
Vol 79 (Appendix) ◽  
pp. 102-102
Author(s):  
K. Hirose ◽  
N. Hishinuma ◽  
T. Asahina ◽  
H. Matsuno ◽  
T. Igarashi
Keyword(s):  
Light Source ◽  
Excimer Light Source

Planar sliding discharge-driven UV excimer light source

2005 ◽  
Author(s):  
N. N. Guivan ◽  
Ludwig L. Shimon ◽  
J. Janca ◽  
A. Brablec ◽  
P. Slavicek ◽  
...  
Keyword(s):  
Light Source ◽  
Sliding Discharge ◽  
Excimer Light Source
Sign in / Sign up

Export Citation Format

Share Document