Langmuir probe diagnostics of a microfabricated inductively coupled plasma on a chip

2003 ◽  
Vol 94 (5) ◽  
pp. 2821-2828 ◽  
Author(s):  
Olga B. Minayeva ◽  
Jeffrey Hopwood
Keyword(s):  
Langmuir Probe ◽  
Inductively Coupled Plasma ◽  
Inductively Coupled ◽  
Probe Diagnostics

Langmuir Probe Diagnostics of Inductively Coupled Plasma Generated Using Flat Spiral Antenna

2020 ◽  
pp. 1-9
Author(s):  
Partha Karar ◽  
Gourav Kumar ◽  
Rajib Kar ◽  
Hitesh M. Kewlani ◽  
D. S. Patil ◽  
...  
Keyword(s):  
Langmuir Probe ◽  
Inductively Coupled Plasma ◽  
Spiral Antenna ◽  
Inductively Coupled ◽  
Probe Diagnostics ◽  
Flat Spiral

Laser, spectroscopic, and Langmuir probe diagnostics of an inductively-coupled rf discharge H− ion source

1992 ◽  
Author(s):  
A. T. Young ◽  
D. A. Bachman ◽  
P. Chen ◽  
K. N. Leung ◽  
C. Y. Li ◽  
...  
Keyword(s):  
Langmuir Probe ◽  
Ion Source ◽  
Rf Discharge ◽  
Inductively Coupled ◽  
Probe Diagnostics ◽  
Laser Spectroscopic

The Experimental Research on Uniformity of Argon Inductively Coupled Plasma at Different Cylinder Heights

2013 ◽  
Vol 724-725 ◽  
pp. 686-691
Author(s):  
Song Bai Wang ◽  
Xian Hui Zhang ◽  
Hong Zhe Wang ◽  
Lin Ying Liu ◽  
Ren Wu Zhou ◽  
...  
Keyword(s):  
Langmuir Probe ◽  
Inductively Coupled Plasma ◽  
Negative Ions ◽  
Plasma Sheath ◽  
Injection System ◽  
Dynamic Processes ◽  
Electronic Density ◽  
Inductively Coupled ◽  
Beam Injection ◽  
Two Factors

We report on the characteristics of argon inductively coupled plasma (ICP) for the ITER neutral beam injection system. In argon ICP, it was found by using Langmuir probe that the radial distribution of electronic density (Ne) was uniform while the radial distributions of both electron temperature (kTe ) and electric potential (VP) were non-uniform. The former depend on two factors: the variation of Ne was small, and the value of Ne was very large. The latter is owing to the generation and disappearance of the negative ions in the ICP, where the additional dynamic processes produce the instability. In addition, both kTe and VP profiles were very similar at the cylinder height H=14 cm, which proves the plasma sheath theory to some extent. Finally, both kTe and VP began flatter with the reduction of the cylinder height, which is owing to the decrease of the negative ions in the ICP.

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