Transmission electron microscopy observation of high-temperature γ-FeSi2 precipitates formed in Si by iron implantation using a metal vapor vacuum arc ion source

2003 ◽  
Vol 83 (4) ◽  
pp. 638-640 ◽  
Author(s):  
Y. Gao ◽  
S. P. Wong ◽  
W. Y. Cheung ◽  
G. Shao ◽  
K. P. Homewood
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
High Temperature ◽  
Metal Vapor ◽  
Ion Source ◽  
Transmission Electron Microscopy Observation ◽  
Vacuum Arc ◽  
Microscopy Observation ◽  
Electron Microscopy Observation ◽  
Transmission Electron
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