Transmission electron microscopy observation of interfacial reactions in high‐temperature sputtered Al alloy/TiN system

1995 ◽  
Vol 66 (11) ◽  
pp. 1328-1330 ◽  
Author(s):  
M. Okihara ◽  
N. Hirashita ◽  
K. Hashimoto ◽  
H. Onoda
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