Optical emission spectroscopy and time-of-flight investigations of plasmas generated from AlN targets in cases of pulsed laser deposition with sub-ps and ns ultraviolet laser pulses
2012 ◽
Vol 78
(6)
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pp. 855-860
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2020 ◽
2006 ◽
Vol 252
(13)
◽
pp. 4667-4671
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