Computational Assessment of the Effect of Nozzle Geometry on the Performance of Gas-Puff Plasma Radiation Sources

2002 ◽  
Author(s):  
John J. Watrous
Keyword(s):  
Plasma Radiation ◽  
Nozzle Geometry ◽  
Radiation Sources

Soft x-ray (0.2

2004 ◽  
Vol 75 (10) ◽  
pp. 4026-4028 ◽  
Author(s):  
B. H. Failor ◽  
N. Qi ◽  
J. S. Levine ◽  
H. Sze ◽  
E. M. Gullickson
Keyword(s):  
Plasma Radiation ◽  
X Ray ◽  
Pinch Plasma ◽  
Radiation Sources ◽  
Z Pinch

Equipment for certifying pulsed plasma radiation sources

1975 ◽  
Vol 18 (11) ◽  
pp. 1651-1653
Author(s):  
G. N. Brazhnichenko ◽  
N. L. Gogolev ◽  
I. N. Dolitskii ◽  
T. A. Fedorenko
Keyword(s):  
Plasma Radiation ◽  
Pulsed Plasma ◽  
Radiation Sources

scholarly journals Simulation and mitigation of the magneto-Rayleigh-Taylor instabilities in Z-pinch gas discharge extreme ultraviolet plasma radiation sources

2013 ◽  
Vol 20 (11) ◽  
pp. 112113 ◽  
Author(s):  
B. Huang ◽  
T. Tomizuka ◽  
B. Xie ◽  
Y. Sakai ◽  
Q. Zhu ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Gas Discharge ◽  
Plasma Radiation ◽  
Radiation Sources ◽  
Z Pinch

Laser plasma radiation sources based on a laser-irradiated gas puff target for x-ray and EUV lithography technologies

2002 ◽  
Author(s):  
Henryk Fiedorowicz ◽  
Andrzej Bartnik ◽  
Roman Jarocki ◽  
Jerzy Kostecki ◽  
Rafal Rakowski ◽  
...  
Keyword(s):  
Laser Plasma ◽  
Plasma Radiation ◽  
X Ray ◽  
Euv Lithography ◽  
Radiation Sources
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