scholarly journals Measurements of atomic carbon density in processing plasmas by vacuum ultraviolet laser absorption spectroscopy

2002 ◽  
Vol 92 (10) ◽  
pp. 5684-5690 ◽  
Author(s):  
Norifusa Tanaka ◽  
Kunihide Tachibana
Keyword(s):  
Absorption Spectroscopy ◽  
Vacuum Ultraviolet ◽  
Carbon Density ◽  
Laser Absorption Spectroscopy ◽  
Atomic Carbon ◽  
Ultraviolet Laser ◽  
Laser Absorption ◽  
Vacuum Ultraviolet Laser

INTRACAVITY LASER ABSORPTION SPECTROSCOPY OF NO2 AND CH4 COOLED IN A SLIT JET SUPERSONIC EXPANSION

1991 ◽  
Vol 01 (C7) ◽  
pp. C7-471-C7-476
Author(s):  
A. CAMPARGUE ◽  
M. CHENEVIER ◽  
A. DELON ◽  
R. JOST ◽  
F. STOECKEL
Keyword(s):  
Absorption Spectroscopy ◽  
Laser Absorption Spectroscopy ◽  
Supersonic Expansion ◽  
Laser Absorption ◽  
Intracavity Laser
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