Vacuum-ultraviolet laser absorption spectroscopy for absolute measurement of fluorine atom density in fluorocarbon plasmas

Kunihide Tachibana; Hideaki Kamisugi

doi:10.1063/1.123861

Vacuum-ultraviolet laser absorption spectroscopy for absolute measurement of fluorine atom density in fluorocarbon plasmas

Applied Physics Letters ◽

10.1063/1.123861 ◽

1999 ◽

Vol 74 (16) ◽

pp. 2390-2392 ◽

Cited By ~ 23

Author(s):

Kunihide Tachibana ◽

Hideaki Kamisugi

Keyword(s):

Absorption Spectroscopy ◽

Fluorine Atom ◽

Vacuum Ultraviolet ◽

Absolute Measurement ◽

Laser Absorption Spectroscopy ◽

Ultraviolet Laser ◽

Atom Density ◽

Laser Absorption ◽

Fluorocarbon Plasmas ◽

Vacuum Ultraviolet Laser

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Measurement Of H And H 2 Populations In-Situ In A Low-Temperature Plasma By Vacuum-Ultraviolet Laser-Absorption Spectroscopy

10.1117/12.951848 ◽

1989 ◽

Cited By ~ 2

Author(s):

A. S. Schlachter ◽

A. T. Young ◽

G. C. Stutzin ◽

J. W. Stearns ◽

H. F. Dobele ◽

...

Keyword(s):

Low Temperature ◽

Absorption Spectroscopy ◽

Vacuum Ultraviolet ◽

Low Temperature Plasma ◽

Laser Absorption Spectroscopy ◽

Temperature Plasma ◽

Ultraviolet Laser ◽

Laser Absorption ◽

Vacuum Ultraviolet Laser

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Measurements of atomic carbon density in processing plasmas by vacuum ultraviolet laser absorption spectroscopy

Journal of Applied Physics ◽

10.1063/1.1513877 ◽

2002 ◽

Vol 92 (10) ◽

pp. 5684-5690 ◽

Cited By ~ 5

Author(s):

Norifusa Tanaka ◽

Kunihide Tachibana

Keyword(s):

Absorption Spectroscopy ◽

Vacuum Ultraviolet ◽

Carbon Density ◽

Laser Absorption Spectroscopy ◽

Atomic Carbon ◽

Ultraviolet Laser ◽

Laser Absorption ◽

Vacuum Ultraviolet Laser

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Measurement of H and H2 populations in a low-temperature plasma by vacuum ultraviolet laser absorption spectroscopy

10.1063/1.38580 ◽

1989 ◽

Author(s):

A. T. Young ◽

G. C. Stutzin ◽

A. S. Schlachter ◽

J. W. Stearns ◽

K. N. Leung ◽

...

Keyword(s):

Low Temperature ◽

Absorption Spectroscopy ◽

Vacuum Ultraviolet ◽

Low Temperature Plasma ◽

Laser Absorption Spectroscopy ◽

Temperature Plasma ◽

Ultraviolet Laser ◽

Laser Absorption ◽

Vacuum Ultraviolet Laser

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Spatiotemporal Behavior of Excited Xenon-Atom Density in Accordance With Xenon Mole Fraction to Neon in Alternating-Current Plasma Display Panels by Laser-Absorption Spectroscopy

IEEE Transactions on Plasma Science ◽

10.1109/tps.2008.922501 ◽

2008 ◽

Vol 36 (3) ◽

pp. 816-820 ◽

Cited By ~ 2

Author(s):

Phil Yong Oh ◽

Jung Hyun Kim ◽

Youngjune Hong ◽

Seok Ho Cho ◽

Guangsup Cho ◽

...

Keyword(s):

Mole Fraction ◽

Absorption Spectroscopy ◽

Alternating Current ◽

Xenon Atom ◽

Laser Absorption Spectroscopy ◽

Atom Density ◽

Laser Absorption ◽

Plasma Display Panels ◽

Spatiotemporal Behavior ◽

Plasma Display

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Development and Metrological Characterization of a Tunable Diode Laser Absorption Spectroscopy (TDLAS) Spectrometer for Simultaneous Absolute Measurement of Carbon Dioxide and Water Vapor

Applied Spectroscopy ◽

10.1366/14-07575 ◽

2015 ◽

Vol 69 (2) ◽

pp. 257-268 ◽

Cited By ~ 35

Author(s):

Andrea Pogány ◽

Steven Wagner ◽

Olav Werhahn ◽

Volker Ebert

Keyword(s):

Carbon Dioxide ◽

Water Vapor ◽

Diode Laser ◽

Absorption Spectroscopy ◽

Absolute Measurement ◽

Tunable Diode Laser ◽

Laser Absorption Spectroscopy ◽

Laser Absorption ◽

Diode Laser Absorption

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Comparison of the Fluorine Atom Density Measured by Actinometry and Vacuum Ultraviolet Absorption Spectroscopy

Japanese Journal of Applied Physics ◽

10.1143/jjap.36.l1261 ◽

1997 ◽

Vol 36 (Part 2, No. 9A/B) ◽

pp. L1261-L1264 ◽

Cited By ~ 34

Author(s):

Yozo Kawai ◽

Koichi Sasaki ◽

Kiyoshi Kadota

Keyword(s):

Absorption Spectroscopy ◽

Fluorine Atom ◽

Vacuum Ultraviolet ◽

Ultraviolet Absorption ◽

Atom Density ◽

Ultraviolet Absorption Spectroscopy

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Determination of fluorine atom density in reactive plasmas by vacuum ultraviolet absorption spectroscopy at 95.85 nm

Review of Scientific Instruments ◽

10.1063/1.1149543 ◽

1999 ◽

Vol 70 (1) ◽

pp. 76-81 ◽

Cited By ~ 19

Author(s):

K. Sasaki ◽

Y. Kawai ◽

K. Kadota

Keyword(s):

Absorption Spectroscopy ◽

Fluorine Atom ◽

Vacuum Ultraviolet ◽

Ultraviolet Absorption ◽

Atom Density ◽

Ultraviolet Absorption Spectroscopy

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Shock-Tube Measurements of Vibrational Relaxation Times in Oxygen and Nitrogen Mixtures Using Ultraviolet Laser Absorption Spectroscopy

AIAA Scitech 2020 Forum ◽

10.2514/6.2020-1940 ◽

2020 ◽

Cited By ~ 2

Author(s):

Jesse W. Streicher ◽

Ajay Krish ◽

Ronald K. Hanson

Keyword(s):

Shock Tube ◽

Absorption Spectroscopy ◽

Vibrational Relaxation ◽

Relaxation Times ◽

Laser Absorption Spectroscopy ◽

Ultraviolet Laser ◽

Laser Absorption

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USING ULTRAVIOLET LASER ABSORPTION SPECTROSCOPY TO MEASURE STATE-SPECIFIC POPULATION HISTORIES OF OXYGEN IN A HYPERSONIC ENVIRONMENT

Proceedings of the 2020 International Symposium on Molecular Spectroscopy ◽

10.15278/isms.2020.wi03 ◽

2020 ◽

Author(s):

Ajay Krish ◽

Ron Hanson ◽

Jesse Streicher

Keyword(s):

Absorption Spectroscopy ◽

Laser Absorption Spectroscopy ◽

Specific Population ◽

Ultraviolet Laser ◽

Laser Absorption

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USING ULTRAVIOLET LASER ABSORPTION SPECTROSCOPY TO MEASURE VIBRATIONAL TEMPERATURE TIME HISTORIES OF SHOCK-HEATED OXYGEN

10.15278/isms.2021.ff11 ◽

2021 ◽

Author(s):

Ajay Krish ◽

Ron Hanson ◽

Jesse Streicher

Keyword(s):

Absorption Spectroscopy ◽

Vibrational Temperature ◽

Laser Absorption Spectroscopy ◽

Ultraviolet Laser ◽

Laser Absorption ◽

Time Histories ◽

Temperature Time

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